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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2006366031> ?p ?o ?g. }

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• W2006366031 date "1987-01-01" @default.
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• W2006366031 title "Direct Formation of Thin Films and Epitaxial Overlayers at low Temperatures Using a Low-Energy (10–;500 ev) Ion Beam Deposition System" @default.
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• W2006366031 doi "https://doi.org/10.1557/proc-93-243" @default.
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