FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007490007> ?p ?o ?g. }

• W2007490007 endingPage "72" @default.
• W2007490007 startingPage "67" @default.
• W2007490007 created "2016-06-24" @default.
• W2007490007 creator A5001433868 @default.
• W2007490007 creator A5005460472 @default.
• W2007490007 creator A5005799740 @default.
• W2007490007 creator A5046666196 @default.
• W2007490007 creator A5067483160 @default.
• W2007490007 date "2013-01-01" @default.
• W2007490007 modified "2023-09-23" @default.
• W2007490007 title "Effects of gas flow rate on the etch characteristics of a low-k sicoh film with an amorphous carbon mask in dual-frequency CF4/C4F8/Ar capacitively-coupled plasmas" @default.
• W2007490007 cites W136070918 @default.
• W2007490007 cites W1649630183 @default.
• W2007490007 cites W1965582025 @default.
• W2007490007 cites W1971042031 @default.
• W2007490007 cites W1976145772 @default.
• W2007490007 cites W1989003705 @default.
• W2007490007 cites W2007157210 @default.
• W2007490007 cites W2025900677 @default.
• W2007490007 cites W2033195663 @default.
• W2007490007 cites W2049254226 @default.
• W2007490007 cites W2049574847 @default.
• W2007490007 cites W2062824111 @default.
• W2007490007 cites W2068250568 @default.
• W2007490007 cites W2070094478 @default.
• W2007490007 cites W2094167831 @default.
• W2007490007 cites W2129999479 @default.
• W2007490007 cites W2330885305 @default.
• W2007490007 cites W2332728471 @default.
• W2007490007 doi "https://doi.org/10.3938/jkps.62.67" @default.
• W2007490007 hasPublicationYear "2013" @default.
• W2007490007 type Work @default.
• W2007490007 sameAs 2007490007 @default.
• W2007490007 citedByCount "4" @default.
• W2007490007 countsByYear W20074900072015 @default.
• W2007490007 countsByYear W20074900072016 @default.
• W2007490007 countsByYear W20074900072022 @default.
• W2007490007 countsByYear W20074900072023 @default.
• W2007490007 crossrefType "journal-article" @default.
• W2007490007 hasAuthorship W2007490007A5001433868 @default.
• W2007490007 hasAuthorship W2007490007A5005460472 @default.
• W2007490007 hasAuthorship W2007490007A5005799740 @default.
• W2007490007 hasAuthorship W2007490007A5046666196 @default.
• W2007490007 hasAuthorship W2007490007A5067483160 @default.
• W2007490007 hasConcept C100460472 @default.
• W2007490007 hasConcept C107187091 @default.
• W2007490007 hasConcept C113196181 @default.
• W2007490007 hasConcept C115545448 @default.
• W2007490007 hasConcept C118792377 @default.
• W2007490007 hasConcept C121332964 @default.
• W2007490007 hasConcept C1291036 @default.
• W2007490007 hasConcept C159985019 @default.
• W2007490007 hasConcept C161790260 @default.
• W2007490007 hasConcept C172120300 @default.
• W2007490007 hasConcept C185592680 @default.
• W2007490007 hasConcept C192562407 @default.
• W2007490007 hasConcept C201931942 @default.
• W2007490007 hasConcept C2779227376 @default.
• W2007490007 hasConcept C43617362 @default.
• W2007490007 hasConcept C44228677 @default.
• W2007490007 hasConcept C521977710 @default.
• W2007490007 hasConcept C55493867 @default.
• W2007490007 hasConcept C56052488 @default.
• W2007490007 hasConcept C62520636 @default.
• W2007490007 hasConcept C68687820 @default.
• W2007490007 hasConcept C8010536 @default.
• W2007490007 hasConcept C81626474 @default.
• W2007490007 hasConcept C82706917 @default.
• W2007490007 hasConcept C95974651 @default.
• W2007490007 hasConceptScore W2007490007C100460472 @default.
• W2007490007 hasConceptScore W2007490007C107187091 @default.
• W2007490007 hasConceptScore W2007490007C113196181 @default.
• W2007490007 hasConceptScore W2007490007C115545448 @default.
• W2007490007 hasConceptScore W2007490007C118792377 @default.
• W2007490007 hasConceptScore W2007490007C121332964 @default.
• W2007490007 hasConceptScore W2007490007C1291036 @default.
• W2007490007 hasConceptScore W2007490007C159985019 @default.
• W2007490007 hasConceptScore W2007490007C161790260 @default.
• W2007490007 hasConceptScore W2007490007C172120300 @default.
• W2007490007 hasConceptScore W2007490007C185592680 @default.
• W2007490007 hasConceptScore W2007490007C192562407 @default.
• W2007490007 hasConceptScore W2007490007C201931942 @default.
• W2007490007 hasConceptScore W2007490007C2779227376 @default.
• W2007490007 hasConceptScore W2007490007C43617362 @default.
• W2007490007 hasConceptScore W2007490007C44228677 @default.
• W2007490007 hasConceptScore W2007490007C521977710 @default.
• W2007490007 hasConceptScore W2007490007C55493867 @default.
• W2007490007 hasConceptScore W2007490007C56052488 @default.
• W2007490007 hasConceptScore W2007490007C62520636 @default.
• W2007490007 hasConceptScore W2007490007C68687820 @default.
• W2007490007 hasConceptScore W2007490007C8010536 @default.
• W2007490007 hasConceptScore W2007490007C81626474 @default.
• W2007490007 hasConceptScore W2007490007C82706917 @default.
• W2007490007 hasConceptScore W2007490007C95974651 @default.
• W2007490007 hasIssue "1" @default.
• W2007490007 hasLocation W20074900071 @default.
• W2007490007 hasOpenAccess W2007490007 @default.
• W2007490007 hasPrimaryLocation W20074900071 @default.
• W2007490007 hasRelatedWork W1963646017 @default.
• W2007490007 hasRelatedWork W1983443637 @default.

• next