Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009904679> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2009904679 created "2016-06-24" @default.
- W2009904679 creator A5017627510 @default.
- W2009904679 creator A5044162436 @default.
- W2009904679 creator A5055652366 @default.
- W2009904679 creator A5062239310 @default.
- W2009904679 date "1986-12-01" @default.
- W2009904679 modified "2023-09-24" @default.
- W2009904679 title "Application of titanium RIE to the fabrication of nm-scale structures" @default.
- W2009904679 cites W1975617774 @default.
- W2009904679 cites W1988495808 @default.
- W2009904679 cites W1998323276 @default.
- W2009904679 cites W1998454193 @default.
- W2009904679 cites W2047048769 @default.
- W2009904679 cites W2063023146 @default.
- W2009904679 cites W2064179573 @default.
- W2009904679 cites W2067099917 @default.
- W2009904679 cites W2501065022 @default.
- W2009904679 doi "https://doi.org/10.1016/0167-9317(86)90055-9" @default.
- W2009904679 hasPublicationYear "1986" @default.
- W2009904679 type Work @default.
- W2009904679 sameAs 2009904679 @default.
- W2009904679 citedByCount "7" @default.
- W2009904679 countsByYear W20099046792018 @default.
- W2009904679 crossrefType "journal-article" @default.
- W2009904679 hasAuthorship W2009904679A5017627510 @default.
- W2009904679 hasAuthorship W2009904679A5044162436 @default.
- W2009904679 hasAuthorship W2009904679A5055652366 @default.
- W2009904679 hasAuthorship W2009904679A5062239310 @default.
- W2009904679 hasConcept C12038964 @default.
- W2009904679 hasConcept C121332964 @default.
- W2009904679 hasConcept C136525101 @default.
- W2009904679 hasConcept C142724271 @default.
- W2009904679 hasConcept C171250308 @default.
- W2009904679 hasConcept C17525397 @default.
- W2009904679 hasConcept C192562407 @default.
- W2009904679 hasConcept C204787440 @default.
- W2009904679 hasConcept C26873012 @default.
- W2009904679 hasConcept C30066665 @default.
- W2009904679 hasConcept C49040817 @default.
- W2009904679 hasConcept C54101563 @default.
- W2009904679 hasConcept C62520636 @default.
- W2009904679 hasConcept C71924100 @default.
- W2009904679 hasConceptScore W2009904679C12038964 @default.
- W2009904679 hasConceptScore W2009904679C121332964 @default.
- W2009904679 hasConceptScore W2009904679C136525101 @default.
- W2009904679 hasConceptScore W2009904679C142724271 @default.
- W2009904679 hasConceptScore W2009904679C171250308 @default.
- W2009904679 hasConceptScore W2009904679C17525397 @default.
- W2009904679 hasConceptScore W2009904679C192562407 @default.
- W2009904679 hasConceptScore W2009904679C204787440 @default.
- W2009904679 hasConceptScore W2009904679C26873012 @default.
- W2009904679 hasConceptScore W2009904679C30066665 @default.
- W2009904679 hasConceptScore W2009904679C49040817 @default.
- W2009904679 hasConceptScore W2009904679C54101563 @default.
- W2009904679 hasConceptScore W2009904679C62520636 @default.
- W2009904679 hasConceptScore W2009904679C71924100 @default.
- W2009904679 hasLocation W20099046791 @default.
- W2009904679 hasOpenAccess W2009904679 @default.
- W2009904679 hasPrimaryLocation W20099046791 @default.
- W2009904679 hasRelatedWork W1662871799 @default.
- W2009904679 hasRelatedWork W1974526528 @default.
- W2009904679 hasRelatedWork W1979192444 @default.
- W2009904679 hasRelatedWork W202573998 @default.
- W2009904679 hasRelatedWork W2033971779 @default.
- W2009904679 hasRelatedWork W2040384377 @default.
- W2009904679 hasRelatedWork W2051837829 @default.
- W2009904679 hasRelatedWork W2094084269 @default.
- W2009904679 hasRelatedWork W2279305539 @default.
- W2009904679 hasRelatedWork W2332660787 @default.
- W2009904679 hasRelatedWork W2509791295 @default.
- W2009904679 hasRelatedWork W2607714332 @default.
- W2009904679 hasRelatedWork W2972861743 @default.
- W2009904679 hasRelatedWork W2995073493 @default.
- W2009904679 hasRelatedWork W3009802691 @default.
- W2009904679 hasRelatedWork W3024869027 @default.
- W2009904679 hasRelatedWork W3121524558 @default.
- W2009904679 hasRelatedWork W3187218283 @default.
- W2009904679 hasRelatedWork W172776223 @default.
- W2009904679 hasRelatedWork W2852342495 @default.
- W2009904679 isParatext "false" @default.
- W2009904679 isRetracted "false" @default.
- W2009904679 magId "2009904679" @default.
- W2009904679 workType "article" @default.