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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013115340> ?p ?o ?g. }

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• W2013115340 date "1994-12-01" @default.
• W2013115340 modified "2023-10-16" @default.
• W2013115340 title "Characterization of silicon dioxide deposited by low-temperature CVD using TEOS and ozone by monoenergetic positron beams" @default.
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• W2013115340 doi "https://doi.org/10.1007/bf02060669" @default.
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