Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013117214> ?p ?o ?g. }
- W2013117214 endingPage "12" @default.
- W2013117214 startingPage "1" @default.
- W2013117214 created "2016-06-24" @default.
- W2013117214 creator A5020967437 @default.
- W2013117214 creator A5085381025 @default.
- W2013117214 date "1994-02-01" @default.
- W2013117214 modified "2023-10-18" @default.
- W2013117214 title "Science of dry etching of III-V materials" @default.
- W2013117214 cites W1964528696 @default.
- W2013117214 cites W1970028192 @default.
- W2013117214 cites W1978769214 @default.
- W2013117214 cites W1988324392 @default.
- W2013117214 cites W1988954699 @default.
- W2013117214 cites W1990644967 @default.
- W2013117214 cites W1990916594 @default.
- W2013117214 cites W1993077416 @default.
- W2013117214 cites W1994322832 @default.
- W2013117214 cites W1996768707 @default.
- W2013117214 cites W2001187850 @default.
- W2013117214 cites W2002273145 @default.
- W2013117214 cites W2003495719 @default.
- W2013117214 cites W2003990790 @default.
- W2013117214 cites W2008129441 @default.
- W2013117214 cites W2010754335 @default.
- W2013117214 cites W2011829920 @default.
- W2013117214 cites W2017438951 @default.
- W2013117214 cites W2019014084 @default.
- W2013117214 cites W2019052097 @default.
- W2013117214 cites W2019343061 @default.
- W2013117214 cites W2019896713 @default.
- W2013117214 cites W2021427334 @default.
- W2013117214 cites W2023644745 @default.
- W2013117214 cites W2025393487 @default.
- W2013117214 cites W2026947343 @default.
- W2013117214 cites W2028204484 @default.
- W2013117214 cites W2037618621 @default.
- W2013117214 cites W2042223251 @default.
- W2013117214 cites W2046552330 @default.
- W2013117214 cites W2046777446 @default.
- W2013117214 cites W2047643603 @default.
- W2013117214 cites W2050980237 @default.
- W2013117214 cites W2055701162 @default.
- W2013117214 cites W2060580014 @default.
- W2013117214 cites W2064446348 @default.
- W2013117214 cites W2064608799 @default.
- W2013117214 cites W2065159930 @default.
- W2013117214 cites W2067469761 @default.
- W2013117214 cites W2067715337 @default.
- W2013117214 cites W2070874192 @default.
- W2013117214 cites W2073185852 @default.
- W2013117214 cites W2073820324 @default.
- W2013117214 cites W2075042018 @default.
- W2013117214 cites W2075434542 @default.
- W2013117214 cites W2080486149 @default.
- W2013117214 cites W2086628834 @default.
- W2013117214 cites W2088337834 @default.
- W2013117214 cites W2089183638 @default.
- W2013117214 cites W2093156254 @default.
- W2013117214 cites W2094058546 @default.
- W2013117214 cites W2095096636 @default.
- W2013117214 cites W2106439282 @default.
- W2013117214 cites W2116340862 @default.
- W2013117214 cites W2128561266 @default.
- W2013117214 cites W2131643037 @default.
- W2013117214 cites W2147546146 @default.
- W2013117214 cites W2154559155 @default.
- W2013117214 cites W2226913695 @default.
- W2013117214 cites W2315162808 @default.
- W2013117214 cites W3146732660 @default.
- W2013117214 cites W4321517052 @default.
- W2013117214 cites W4365787421 @default.
- W2013117214 cites W4375921257 @default.
- W2013117214 doi "https://doi.org/10.1007/bf00717875" @default.
- W2013117214 hasPublicationYear "1994" @default.
- W2013117214 type Work @default.
- W2013117214 sameAs 2013117214 @default.
- W2013117214 citedByCount "12" @default.
- W2013117214 countsByYear W20131172142012 @default.
- W2013117214 countsByYear W20131172142013 @default.
- W2013117214 countsByYear W20131172142015 @default.
- W2013117214 countsByYear W20131172142017 @default.
- W2013117214 crossrefType "journal-article" @default.
- W2013117214 hasAuthorship W2013117214A5020967437 @default.
- W2013117214 hasAuthorship W2013117214A5085381025 @default.
- W2013117214 hasConcept C100460472 @default.
- W2013117214 hasConcept C107872376 @default.
- W2013117214 hasConcept C108225325 @default.
- W2013117214 hasConcept C113196181 @default.
- W2013117214 hasConcept C1291036 @default.
- W2013117214 hasConcept C130472188 @default.
- W2013117214 hasConcept C145148216 @default.
- W2013117214 hasConcept C160671074 @default.
- W2013117214 hasConcept C171250308 @default.
- W2013117214 hasConcept C175361016 @default.
- W2013117214 hasConcept C178790620 @default.
- W2013117214 hasConcept C185592680 @default.
- W2013117214 hasConcept C191897082 @default.
- W2013117214 hasConcept C192562407 @default.
- W2013117214 hasConcept C2779227376 @default.
- W2013117214 hasConcept C49040817 @default.