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- W2013193854 created "2016-06-24" @default.
- W2013193854 creator A5055859719 @default.
- W2013193854 creator A5066855135 @default.
- W2013193854 date "2019-12-16" @default.
- W2013193854 modified "2023-10-16" @default.
- W2013193854 title "Data Driven CMP Manufacturing Modeling for Process and Design Optimization" @default.
- W2013193854 doi "https://doi.org/10.1149/1.3567651" @default.
- W2013193854 hasPublicationYear "2019" @default.
- W2013193854 type Work @default.
- W2013193854 sameAs 2013193854 @default.
- W2013193854 citedByCount "0" @default.
- W2013193854 crossrefType "journal-article" @default.
- W2013193854 hasAuthorship W2013193854A5055859719 @default.
- W2013193854 hasAuthorship W2013193854A5066855135 @default.
- W2013193854 hasConcept C115952470 @default.
- W2013193854 hasConcept C117671659 @default.
- W2013193854 hasConcept C127413603 @default.
- W2013193854 hasConcept C13736549 @default.
- W2013193854 hasConcept C199360897 @default.
- W2013193854 hasConcept C21880701 @default.
- W2013193854 hasConcept C41008148 @default.
- W2013193854 hasConcept C42360764 @default.
- W2013193854 hasConcept C98045186 @default.
- W2013193854 hasConceptScore W2013193854C115952470 @default.
- W2013193854 hasConceptScore W2013193854C117671659 @default.
- W2013193854 hasConceptScore W2013193854C127413603 @default.
- W2013193854 hasConceptScore W2013193854C13736549 @default.
- W2013193854 hasConceptScore W2013193854C199360897 @default.
- W2013193854 hasConceptScore W2013193854C21880701 @default.
- W2013193854 hasConceptScore W2013193854C41008148 @default.
- W2013193854 hasConceptScore W2013193854C42360764 @default.
- W2013193854 hasConceptScore W2013193854C98045186 @default.
- W2013193854 hasLocation W20131938541 @default.
- W2013193854 hasOpenAccess W2013193854 @default.
- W2013193854 hasPrimaryLocation W20131938541 @default.
- W2013193854 hasRelatedWork W10473041 @default.
- W2013193854 hasRelatedWork W11956869 @default.
- W2013193854 hasRelatedWork W12979907 @default.
- W2013193854 hasRelatedWork W1566275 @default.
- W2013193854 hasRelatedWork W3331621 @default.
- W2013193854 hasRelatedWork W425490 @default.
- W2013193854 hasRelatedWork W6172808 @default.
- W2013193854 hasRelatedWork W6517504 @default.
- W2013193854 hasRelatedWork W714171 @default.
- W2013193854 hasRelatedWork W10925555 @default.
- W2013193854 isParatext "false" @default.
- W2013193854 isRetracted "false" @default.
- W2013193854 magId "2013193854" @default.
- W2013193854 workType "article" @default.