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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2013321719> ?p ?o ?g. }

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• W2013321719 date "2009-11-01" @default.
• W2013321719 modified "2023-09-28" @default.
• W2013321719 title "Growth of AlN Films and Its Process Development for the Fabrication of Acoustic Devices and Micromachined Structures" @default.
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• W2013321719 doi "https://doi.org/10.1007/s11665-008-9350-1" @default.
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