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- W2015759321 created "2016-06-24" @default.
- W2015759321 creator A5023624056 @default.
- W2015759321 creator A5031272851 @default.
- W2015759321 creator A5037427468 @default.
- W2015759321 creator A5047211286 @default.
- W2015759321 creator A5067663622 @default.
- W2015759321 date "1990-01-01" @default.
- W2015759321 modified "2023-09-23" @default.
- W2015759321 title "Blanket and Selective Copper CVD from Cu (Fod)2 For Multilevel Metallization" @default.
- W2015759321 cites W1996551465 @default.
- W2015759321 cites W2015018128 @default.
- W2015759321 cites W2021015832 @default.
- W2015759321 cites W2022306153 @default.
- W2015759321 cites W2051116798 @default.
- W2015759321 cites W2077244276 @default.
- W2015759321 cites W2084709453 @default.
- W2015759321 cites W2087614528 @default.
- W2015759321 doi "https://doi.org/10.1557/proc-181-79" @default.
- W2015759321 hasPublicationYear "1990" @default.
- W2015759321 type Work @default.
- W2015759321 sameAs 2015759321 @default.
- W2015759321 citedByCount "6" @default.
- W2015759321 crossrefType "journal-article" @default.
- W2015759321 hasAuthorship W2015759321A5023624056 @default.
- W2015759321 hasAuthorship W2015759321A5031272851 @default.
- W2015759321 hasAuthorship W2015759321A5037427468 @default.
- W2015759321 hasAuthorship W2015759321A5047211286 @default.
- W2015759321 hasAuthorship W2015759321A5067663622 @default.
- W2015759321 hasConcept C113196181 @default.
- W2015759321 hasConcept C119599485 @default.
- W2015759321 hasConcept C121332964 @default.
- W2015759321 hasConcept C127413603 @default.
- W2015759321 hasConcept C138055206 @default.
- W2015759321 hasConcept C159985019 @default.
- W2015759321 hasConcept C171250308 @default.
- W2015759321 hasConcept C185544564 @default.
- W2015759321 hasConcept C185592680 @default.
- W2015759321 hasConcept C191897082 @default.
- W2015759321 hasConcept C192562407 @default.
- W2015759321 hasConcept C25442681 @default.
- W2015759321 hasConcept C26771246 @default.
- W2015759321 hasConcept C2779227376 @default.
- W2015759321 hasConcept C43617362 @default.
- W2015759321 hasConcept C49040817 @default.
- W2015759321 hasConcept C544778455 @default.
- W2015759321 hasConcept C66825105 @default.
- W2015759321 hasConcept C69990965 @default.
- W2015759321 hasConcept C94857076 @default.
- W2015759321 hasConceptScore W2015759321C113196181 @default.
- W2015759321 hasConceptScore W2015759321C119599485 @default.
- W2015759321 hasConceptScore W2015759321C121332964 @default.
- W2015759321 hasConceptScore W2015759321C127413603 @default.
- W2015759321 hasConceptScore W2015759321C138055206 @default.
- W2015759321 hasConceptScore W2015759321C159985019 @default.
- W2015759321 hasConceptScore W2015759321C171250308 @default.
- W2015759321 hasConceptScore W2015759321C185544564 @default.
- W2015759321 hasConceptScore W2015759321C185592680 @default.
- W2015759321 hasConceptScore W2015759321C191897082 @default.
- W2015759321 hasConceptScore W2015759321C192562407 @default.
- W2015759321 hasConceptScore W2015759321C25442681 @default.
- W2015759321 hasConceptScore W2015759321C26771246 @default.
- W2015759321 hasConceptScore W2015759321C2779227376 @default.
- W2015759321 hasConceptScore W2015759321C43617362 @default.
- W2015759321 hasConceptScore W2015759321C49040817 @default.
- W2015759321 hasConceptScore W2015759321C544778455 @default.
- W2015759321 hasConceptScore W2015759321C66825105 @default.
- W2015759321 hasConceptScore W2015759321C69990965 @default.
- W2015759321 hasConceptScore W2015759321C94857076 @default.
- W2015759321 hasLocation W20157593211 @default.
- W2015759321 hasOpenAccess W2015759321 @default.
- W2015759321 hasPrimaryLocation W20157593211 @default.
- W2015759321 hasRelatedWork W2003921226 @default.
- W2015759321 hasRelatedWork W2015759321 @default.
- W2015759321 hasRelatedWork W2024515736 @default.
- W2015759321 hasRelatedWork W2086829320 @default.
- W2015759321 hasRelatedWork W2151219093 @default.
- W2015759321 hasRelatedWork W2164472937 @default.
- W2015759321 hasRelatedWork W2412444643 @default.
- W2015759321 hasRelatedWork W2999761843 @default.
- W2015759321 hasRelatedWork W3196119146 @default.
- W2015759321 hasRelatedWork W342507391 @default.
- W2015759321 hasVolume "181" @default.
- W2015759321 isParatext "false" @default.
- W2015759321 isRetracted "false" @default.
- W2015759321 magId "2015759321" @default.
- W2015759321 workType "article" @default.