Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016275791> ?p ?o ?g. }
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100
with 100 items per page.
- W2016275791 endingPage "812" @default.
- W2016275791 startingPage "808" @default.
- W2016275791 created "2016-06-24" @default.
- W2016275791 creator A5031383593 @default.
- W2016275791 creator A5086524020 @default.
- W2016275791 date "2012-07-14" @default.
- W2016275791 modified "2023-10-11" @default.
- W2016275791 title "RF plasma chemical vapor deposition of SiN x :H films" @default.
- W2016275791 cites W1988092023 @default.
- W2016275791 cites W2055535716 @default.
- W2016275791 cites W2059124788 @default.
- W2016275791 cites W2113839441 @default.
- W2016275791 cites W2114345191 @default.
- W2016275791 cites W29560388 @default.
- W2016275791 doi "https://doi.org/10.1134/s0020168512070151" @default.
- W2016275791 hasPublicationYear "2012" @default.
- W2016275791 type Work @default.
- W2016275791 sameAs 2016275791 @default.
- W2016275791 citedByCount "1" @default.
- W2016275791 countsByYear W20162757912019 @default.
- W2016275791 crossrefType "journal-article" @default.
- W2016275791 hasAuthorship W2016275791A5031383593 @default.
- W2016275791 hasAuthorship W2016275791A5086524020 @default.
- W2016275791 hasConcept C107872376 @default.
- W2016275791 hasConcept C113196181 @default.
- W2016275791 hasConcept C121332964 @default.
- W2016275791 hasConcept C127413603 @default.
- W2016275791 hasConcept C136525101 @default.
- W2016275791 hasConcept C142724271 @default.
- W2016275791 hasConcept C145738678 @default.
- W2016275791 hasConcept C151730666 @default.
- W2016275791 hasConcept C171250308 @default.
- W2016275791 hasConcept C183866003 @default.
- W2016275791 hasConcept C185592680 @default.
- W2016275791 hasConcept C19067145 @default.
- W2016275791 hasConcept C192562407 @default.
- W2016275791 hasConcept C194760766 @default.
- W2016275791 hasConcept C204787440 @default.
- W2016275791 hasConcept C2777431650 @default.
- W2016275791 hasConcept C2779227376 @default.
- W2016275791 hasConcept C2816523 @default.
- W2016275791 hasConcept C38347018 @default.
- W2016275791 hasConcept C42360764 @default.
- W2016275791 hasConcept C49040817 @default.
- W2016275791 hasConcept C544956773 @default.
- W2016275791 hasConcept C57410435 @default.
- W2016275791 hasConcept C62520636 @default.
- W2016275791 hasConcept C64297162 @default.
- W2016275791 hasConcept C71924100 @default.
- W2016275791 hasConcept C75937256 @default.
- W2016275791 hasConcept C82706917 @default.
- W2016275791 hasConcept C86803240 @default.
- W2016275791 hasConceptScore W2016275791C107872376 @default.
- W2016275791 hasConceptScore W2016275791C113196181 @default.
- W2016275791 hasConceptScore W2016275791C121332964 @default.
- W2016275791 hasConceptScore W2016275791C127413603 @default.
- W2016275791 hasConceptScore W2016275791C136525101 @default.
- W2016275791 hasConceptScore W2016275791C142724271 @default.
- W2016275791 hasConceptScore W2016275791C145738678 @default.
- W2016275791 hasConceptScore W2016275791C151730666 @default.
- W2016275791 hasConceptScore W2016275791C171250308 @default.
- W2016275791 hasConceptScore W2016275791C183866003 @default.
- W2016275791 hasConceptScore W2016275791C185592680 @default.
- W2016275791 hasConceptScore W2016275791C19067145 @default.
- W2016275791 hasConceptScore W2016275791C192562407 @default.
- W2016275791 hasConceptScore W2016275791C194760766 @default.
- W2016275791 hasConceptScore W2016275791C204787440 @default.
- W2016275791 hasConceptScore W2016275791C2777431650 @default.
- W2016275791 hasConceptScore W2016275791C2779227376 @default.
- W2016275791 hasConceptScore W2016275791C2816523 @default.
- W2016275791 hasConceptScore W2016275791C38347018 @default.
- W2016275791 hasConceptScore W2016275791C42360764 @default.
- W2016275791 hasConceptScore W2016275791C49040817 @default.
- W2016275791 hasConceptScore W2016275791C544956773 @default.
- W2016275791 hasConceptScore W2016275791C57410435 @default.
- W2016275791 hasConceptScore W2016275791C62520636 @default.
- W2016275791 hasConceptScore W2016275791C64297162 @default.
- W2016275791 hasConceptScore W2016275791C71924100 @default.
- W2016275791 hasConceptScore W2016275791C75937256 @default.
- W2016275791 hasConceptScore W2016275791C82706917 @default.
- W2016275791 hasConceptScore W2016275791C86803240 @default.
- W2016275791 hasIssue "8" @default.
- W2016275791 hasLocation W20162757911 @default.
- W2016275791 hasOpenAccess W2016275791 @default.
- W2016275791 hasPrimaryLocation W20162757911 @default.
- W2016275791 hasRelatedWork W1971984726 @default.
- W2016275791 hasRelatedWork W1994864589 @default.
- W2016275791 hasRelatedWork W2060824718 @default.
- W2016275791 hasRelatedWork W2080028475 @default.
- W2016275791 hasRelatedWork W2242656207 @default.
- W2016275791 hasRelatedWork W2281404491 @default.
- W2016275791 hasRelatedWork W2312852125 @default.
- W2016275791 hasRelatedWork W2411504699 @default.
- W2016275791 hasRelatedWork W3134004627 @default.
- W2016275791 hasRelatedWork W3150710940 @default.
- W2016275791 hasVolume "48" @default.
- W2016275791 isParatext "false" @default.
- W2016275791 isRetracted "false" @default.
- W2016275791 magId "2016275791" @default.
- W2016275791 workType "article" @default.