Matches in SemOpenAlex for { <https://semopenalex.org/work/W2018840607> ?p ?o ?g. }
- W2018840607 endingPage "1679" @default.
- W2018840607 startingPage "1673" @default.
- W2018840607 created "2016-06-24" @default.
- W2018840607 creator A5007695479 @default.
- W2018840607 creator A5017230618 @default.
- W2018840607 creator A5029735225 @default.
- W2018840607 creator A5030844651 @default.
- W2018840607 creator A5039657685 @default.
- W2018840607 creator A5051390441 @default.
- W2018840607 date "2015-04-01" @default.
- W2018840607 modified "2023-10-18" @default.
- W2018840607 title "Fabrication process of a microstructures based on hydrogenated amorphous SiGe films for applications in MEMS devices" @default.
- W2018840607 cites W1670690871 @default.
- W2018840607 cites W1968279179 @default.
- W2018840607 cites W1973227271 @default.
- W2018840607 cites W1978638375 @default.
- W2018840607 cites W1980843646 @default.
- W2018840607 cites W1982495274 @default.
- W2018840607 cites W1997767452 @default.
- W2018840607 cites W2002328722 @default.
- W2018840607 cites W2007697940 @default.
- W2018840607 cites W2007954272 @default.
- W2018840607 cites W2010319844 @default.
- W2018840607 cites W2029375485 @default.
- W2018840607 cites W2036494167 @default.
- W2018840607 cites W2043397397 @default.
- W2018840607 cites W2047527629 @default.
- W2018840607 cites W2055302183 @default.
- W2018840607 cites W2075932192 @default.
- W2018840607 cites W2080701973 @default.
- W2018840607 cites W2092276057 @default.
- W2018840607 cites W2095482893 @default.
- W2018840607 cites W2100168240 @default.
- W2018840607 cites W2100482441 @default.
- W2018840607 cites W2102814598 @default.
- W2018840607 cites W2112726158 @default.
- W2018840607 cites W2124236326 @default.
- W2018840607 cites W2133569901 @default.
- W2018840607 cites W2134571742 @default.
- W2018840607 cites W2140804926 @default.
- W2018840607 doi "https://doi.org/10.1007/s12206-015-0339-z" @default.
- W2018840607 hasPublicationYear "2015" @default.
- W2018840607 type Work @default.
- W2018840607 sameAs 2018840607 @default.
- W2018840607 citedByCount "1" @default.
- W2018840607 countsByYear W20188406072019 @default.
- W2018840607 crossrefType "journal-article" @default.
- W2018840607 hasAuthorship W2018840607A5007695479 @default.
- W2018840607 hasAuthorship W2018840607A5017230618 @default.
- W2018840607 hasAuthorship W2018840607A5029735225 @default.
- W2018840607 hasAuthorship W2018840607A5030844651 @default.
- W2018840607 hasAuthorship W2018840607A5039657685 @default.
- W2018840607 hasAuthorship W2018840607A5051390441 @default.
- W2018840607 hasConcept C136525101 @default.
- W2018840607 hasConcept C142724271 @default.
- W2018840607 hasConcept C145667562 @default.
- W2018840607 hasConcept C159985019 @default.
- W2018840607 hasConcept C171250308 @default.
- W2018840607 hasConcept C185592680 @default.
- W2018840607 hasConcept C192562407 @default.
- W2018840607 hasConcept C201931942 @default.
- W2018840607 hasConcept C204787440 @default.
- W2018840607 hasConcept C2776390347 @default.
- W2018840607 hasConcept C2779227376 @default.
- W2018840607 hasConcept C2779667780 @default.
- W2018840607 hasConcept C37292000 @default.
- W2018840607 hasConcept C37977207 @default.
- W2018840607 hasConcept C38347018 @default.
- W2018840607 hasConcept C49040817 @default.
- W2018840607 hasConcept C544956773 @default.
- W2018840607 hasConcept C56052488 @default.
- W2018840607 hasConcept C57410435 @default.
- W2018840607 hasConcept C71924100 @default.
- W2018840607 hasConcept C8010536 @default.
- W2018840607 hasConcept C87976508 @default.
- W2018840607 hasConceptScore W2018840607C136525101 @default.
- W2018840607 hasConceptScore W2018840607C142724271 @default.
- W2018840607 hasConceptScore W2018840607C145667562 @default.
- W2018840607 hasConceptScore W2018840607C159985019 @default.
- W2018840607 hasConceptScore W2018840607C171250308 @default.
- W2018840607 hasConceptScore W2018840607C185592680 @default.
- W2018840607 hasConceptScore W2018840607C192562407 @default.
- W2018840607 hasConceptScore W2018840607C201931942 @default.
- W2018840607 hasConceptScore W2018840607C204787440 @default.
- W2018840607 hasConceptScore W2018840607C2776390347 @default.
- W2018840607 hasConceptScore W2018840607C2779227376 @default.
- W2018840607 hasConceptScore W2018840607C2779667780 @default.
- W2018840607 hasConceptScore W2018840607C37292000 @default.
- W2018840607 hasConceptScore W2018840607C37977207 @default.
- W2018840607 hasConceptScore W2018840607C38347018 @default.
- W2018840607 hasConceptScore W2018840607C49040817 @default.
- W2018840607 hasConceptScore W2018840607C544956773 @default.
- W2018840607 hasConceptScore W2018840607C56052488 @default.
- W2018840607 hasConceptScore W2018840607C57410435 @default.
- W2018840607 hasConceptScore W2018840607C71924100 @default.
- W2018840607 hasConceptScore W2018840607C8010536 @default.
- W2018840607 hasConceptScore W2018840607C87976508 @default.
- W2018840607 hasIssue "4" @default.
- W2018840607 hasLocation W20188406071 @default.
- W2018840607 hasOpenAccess W2018840607 @default.