Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023369174> ?p ?o ?g. }
Showing items 1 to 65 of
65
with 100 items per page.
- W2023369174 created "2016-06-24" @default.
- W2023369174 creator A5022790433 @default.
- W2023369174 creator A5086461489 @default.
- W2023369174 creator A5086823671 @default.
- W2023369174 date "2004-01-01" @default.
- W2023369174 modified "2023-10-01" @default.
- W2023369174 title "Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization" @default.
- W2023369174 cites W2032824931 @default.
- W2023369174 cites W2091989934 @default.
- W2023369174 cites W2147422905 @default.
- W2023369174 doi "https://doi.org/10.1557/proc-838-o10.5" @default.
- W2023369174 hasPublicationYear "2004" @default.
- W2023369174 type Work @default.
- W2023369174 sameAs 2023369174 @default.
- W2023369174 citedByCount "0" @default.
- W2023369174 crossrefType "journal-article" @default.
- W2023369174 hasAuthorship W2023369174A5022790433 @default.
- W2023369174 hasAuthorship W2023369174A5086461489 @default.
- W2023369174 hasAuthorship W2023369174A5086823671 @default.
- W2023369174 hasConcept C102951782 @default.
- W2023369174 hasConcept C105066941 @default.
- W2023369174 hasConcept C120398109 @default.
- W2023369174 hasConcept C155310634 @default.
- W2023369174 hasConcept C159985019 @default.
- W2023369174 hasConcept C171250308 @default.
- W2023369174 hasConcept C180088628 @default.
- W2023369174 hasConcept C192562407 @default.
- W2023369174 hasConcept C2777431650 @default.
- W2023369174 hasConcept C2779227376 @default.
- W2023369174 hasConcept C49040817 @default.
- W2023369174 hasConcept C544956773 @default.
- W2023369174 hasConcept C6518042 @default.
- W2023369174 hasConcept C77066764 @default.
- W2023369174 hasConceptScore W2023369174C102951782 @default.
- W2023369174 hasConceptScore W2023369174C105066941 @default.
- W2023369174 hasConceptScore W2023369174C120398109 @default.
- W2023369174 hasConceptScore W2023369174C155310634 @default.
- W2023369174 hasConceptScore W2023369174C159985019 @default.
- W2023369174 hasConceptScore W2023369174C171250308 @default.
- W2023369174 hasConceptScore W2023369174C180088628 @default.
- W2023369174 hasConceptScore W2023369174C192562407 @default.
- W2023369174 hasConceptScore W2023369174C2777431650 @default.
- W2023369174 hasConceptScore W2023369174C2779227376 @default.
- W2023369174 hasConceptScore W2023369174C49040817 @default.
- W2023369174 hasConceptScore W2023369174C544956773 @default.
- W2023369174 hasConceptScore W2023369174C6518042 @default.
- W2023369174 hasConceptScore W2023369174C77066764 @default.
- W2023369174 hasLocation W20233691741 @default.
- W2023369174 hasOpenAccess W2023369174 @default.
- W2023369174 hasPrimaryLocation W20233691741 @default.
- W2023369174 hasRelatedWork W1575006194 @default.
- W2023369174 hasRelatedWork W1986267742 @default.
- W2023369174 hasRelatedWork W1993921662 @default.
- W2023369174 hasRelatedWork W2023369174 @default.
- W2023369174 hasRelatedWork W2031893831 @default.
- W2023369174 hasRelatedWork W2033956182 @default.
- W2023369174 hasRelatedWork W2035319641 @default.
- W2023369174 hasRelatedWork W2048230658 @default.
- W2023369174 hasRelatedWork W2320268575 @default.
- W2023369174 hasRelatedWork W3038936803 @default.
- W2023369174 hasVolume "838" @default.
- W2023369174 isParatext "false" @default.
- W2023369174 isRetracted "false" @default.
- W2023369174 magId "2023369174" @default.
- W2023369174 workType "article" @default.