Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023726048> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2023726048 endingPage "228" @default.
- W2023726048 startingPage "226" @default.
- W2023726048 created "2016-06-24" @default.
- W2023726048 creator A5022788165 @default.
- W2023726048 creator A5081131923 @default.
- W2023726048 date "2009-03-01" @default.
- W2023726048 modified "2023-10-18" @default.
- W2023726048 title "Deposition of silicon oxynitride films by ion beam sputtering at room temperature" @default.
- W2023726048 cites W1971034892 @default.
- W2023726048 cites W2007794705 @default.
- W2023726048 cites W2013944232 @default.
- W2023726048 cites W2016702851 @default.
- W2023726048 cites W2017657118 @default.
- W2023726048 cites W2038421650 @default.
- W2023726048 cites W2048062531 @default.
- W2023726048 cites W2055593121 @default.
- W2023726048 cites W2091584470 @default.
- W2023726048 cites W2147644751 @default.
- W2023726048 doi "https://doi.org/10.1007/s10043-009-0042-3" @default.
- W2023726048 hasPublicationYear "2009" @default.
- W2023726048 type Work @default.
- W2023726048 sameAs 2023726048 @default.
- W2023726048 citedByCount "4" @default.
- W2023726048 countsByYear W20237260482012 @default.
- W2023726048 countsByYear W20237260482020 @default.
- W2023726048 crossrefType "journal-article" @default.
- W2023726048 hasAuthorship W2023726048A5022788165 @default.
- W2023726048 hasAuthorship W2023726048A5081131923 @default.
- W2023726048 hasConcept C107365816 @default.
- W2023726048 hasConcept C113196181 @default.
- W2023726048 hasConcept C120665830 @default.
- W2023726048 hasConcept C121332964 @default.
- W2023726048 hasConcept C151730666 @default.
- W2023726048 hasConcept C159985019 @default.
- W2023726048 hasConcept C168834538 @default.
- W2023726048 hasConcept C171250308 @default.
- W2023726048 hasConcept C185592680 @default.
- W2023726048 hasConcept C19067145 @default.
- W2023726048 hasConcept C192562407 @default.
- W2023726048 hasConcept C22423302 @default.
- W2023726048 hasConcept C2777431650 @default.
- W2023726048 hasConcept C2779476251 @default.
- W2023726048 hasConcept C2781463530 @default.
- W2023726048 hasConcept C2816523 @default.
- W2023726048 hasConcept C42067758 @default.
- W2023726048 hasConcept C43617362 @default.
- W2023726048 hasConcept C49040817 @default.
- W2023726048 hasConcept C50774322 @default.
- W2023726048 hasConcept C544956773 @default.
- W2023726048 hasConcept C64297162 @default.
- W2023726048 hasConcept C71039073 @default.
- W2023726048 hasConcept C76046532 @default.
- W2023726048 hasConcept C86803240 @default.
- W2023726048 hasConceptScore W2023726048C107365816 @default.
- W2023726048 hasConceptScore W2023726048C113196181 @default.
- W2023726048 hasConceptScore W2023726048C120665830 @default.
- W2023726048 hasConceptScore W2023726048C121332964 @default.
- W2023726048 hasConceptScore W2023726048C151730666 @default.
- W2023726048 hasConceptScore W2023726048C159985019 @default.
- W2023726048 hasConceptScore W2023726048C168834538 @default.
- W2023726048 hasConceptScore W2023726048C171250308 @default.
- W2023726048 hasConceptScore W2023726048C185592680 @default.
- W2023726048 hasConceptScore W2023726048C19067145 @default.
- W2023726048 hasConceptScore W2023726048C192562407 @default.
- W2023726048 hasConceptScore W2023726048C22423302 @default.
- W2023726048 hasConceptScore W2023726048C2777431650 @default.
- W2023726048 hasConceptScore W2023726048C2779476251 @default.
- W2023726048 hasConceptScore W2023726048C2781463530 @default.
- W2023726048 hasConceptScore W2023726048C2816523 @default.
- W2023726048 hasConceptScore W2023726048C42067758 @default.
- W2023726048 hasConceptScore W2023726048C43617362 @default.
- W2023726048 hasConceptScore W2023726048C49040817 @default.
- W2023726048 hasConceptScore W2023726048C50774322 @default.
- W2023726048 hasConceptScore W2023726048C544956773 @default.
- W2023726048 hasConceptScore W2023726048C64297162 @default.
- W2023726048 hasConceptScore W2023726048C71039073 @default.
- W2023726048 hasConceptScore W2023726048C76046532 @default.
- W2023726048 hasConceptScore W2023726048C86803240 @default.
- W2023726048 hasIssue "2" @default.
- W2023726048 hasLocation W20237260481 @default.
- W2023726048 hasOpenAccess W2023726048 @default.
- W2023726048 hasPrimaryLocation W20237260481 @default.
- W2023726048 hasRelatedWork W1566961201 @default.
- W2023726048 hasRelatedWork W2001632817 @default.
- W2023726048 hasRelatedWork W2020653261 @default.
- W2023726048 hasRelatedWork W2034731640 @default.
- W2023726048 hasRelatedWork W2109281349 @default.
- W2023726048 hasRelatedWork W2325131937 @default.
- W2023726048 hasRelatedWork W2371191966 @default.
- W2023726048 hasRelatedWork W2377811089 @default.
- W2023726048 hasRelatedWork W2382289590 @default.
- W2023726048 hasRelatedWork W2956576485 @default.
- W2023726048 hasVolume "16" @default.
- W2023726048 isParatext "false" @default.
- W2023726048 isRetracted "false" @default.
- W2023726048 magId "2023726048" @default.
- W2023726048 workType "article" @default.