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- W2025571073 created "2016-06-24" @default.
- W2025571073 creator A5085497687 @default.
- W2025571073 creator A5085675316 @default.
- W2025571073 date "1997-01-01" @default.
- W2025571073 modified "2023-09-26" @default.
- W2025571073 title "3D Atomistic Simulations of Submicron Device Fabrication" @default.
- W2025571073 cites W2012395578 @default.
- W2025571073 cites W2033547788 @default.
- W2025571073 doi "https://doi.org/10.1557/proc-490-3" @default.
- W2025571073 hasPublicationYear "1997" @default.
- W2025571073 type Work @default.
- W2025571073 sameAs 2025571073 @default.
- W2025571073 citedByCount "2" @default.
- W2025571073 crossrefType "journal-article" @default.
- W2025571073 hasAuthorship W2025571073A5085497687 @default.
- W2025571073 hasAuthorship W2025571073A5085675316 @default.
- W2025571073 hasConcept C105795698 @default.
- W2025571073 hasConcept C121332964 @default.
- W2025571073 hasConcept C136525101 @default.
- W2025571073 hasConcept C142724271 @default.
- W2025571073 hasConcept C145148216 @default.
- W2025571073 hasConcept C147597530 @default.
- W2025571073 hasConcept C159467904 @default.
- W2025571073 hasConcept C159985019 @default.
- W2025571073 hasConcept C178790620 @default.
- W2025571073 hasConcept C185592680 @default.
- W2025571073 hasConcept C191952053 @default.
- W2025571073 hasConcept C192562407 @default.
- W2025571073 hasConcept C19499675 @default.
- W2025571073 hasConcept C204787440 @default.
- W2025571073 hasConcept C2777855556 @default.
- W2025571073 hasConcept C33923547 @default.
- W2025571073 hasConcept C41823505 @default.
- W2025571073 hasConcept C41999313 @default.
- W2025571073 hasConcept C45786274 @default.
- W2025571073 hasConcept C49040817 @default.
- W2025571073 hasConcept C501308230 @default.
- W2025571073 hasConcept C57863236 @default.
- W2025571073 hasConcept C59593255 @default.
- W2025571073 hasConcept C62520636 @default.
- W2025571073 hasConcept C71924100 @default.
- W2025571073 hasConceptScore W2025571073C105795698 @default.
- W2025571073 hasConceptScore W2025571073C121332964 @default.
- W2025571073 hasConceptScore W2025571073C136525101 @default.
- W2025571073 hasConceptScore W2025571073C142724271 @default.
- W2025571073 hasConceptScore W2025571073C145148216 @default.
- W2025571073 hasConceptScore W2025571073C147597530 @default.
- W2025571073 hasConceptScore W2025571073C159467904 @default.
- W2025571073 hasConceptScore W2025571073C159985019 @default.
- W2025571073 hasConceptScore W2025571073C178790620 @default.
- W2025571073 hasConceptScore W2025571073C185592680 @default.
- W2025571073 hasConceptScore W2025571073C191952053 @default.
- W2025571073 hasConceptScore W2025571073C192562407 @default.
- W2025571073 hasConceptScore W2025571073C19499675 @default.
- W2025571073 hasConceptScore W2025571073C204787440 @default.
- W2025571073 hasConceptScore W2025571073C2777855556 @default.
- W2025571073 hasConceptScore W2025571073C33923547 @default.
- W2025571073 hasConceptScore W2025571073C41823505 @default.
- W2025571073 hasConceptScore W2025571073C41999313 @default.
- W2025571073 hasConceptScore W2025571073C45786274 @default.
- W2025571073 hasConceptScore W2025571073C49040817 @default.
- W2025571073 hasConceptScore W2025571073C501308230 @default.
- W2025571073 hasConceptScore W2025571073C57863236 @default.
- W2025571073 hasConceptScore W2025571073C59593255 @default.
- W2025571073 hasConceptScore W2025571073C62520636 @default.
- W2025571073 hasConceptScore W2025571073C71924100 @default.
- W2025571073 hasLocation W20255710731 @default.
- W2025571073 hasOpenAccess W2025571073 @default.
- W2025571073 hasPrimaryLocation W20255710731 @default.
- W2025571073 hasRelatedWork W1544109952 @default.
- W2025571073 hasRelatedWork W1629195660 @default.
- W2025571073 hasRelatedWork W1984782763 @default.
- W2025571073 hasRelatedWork W2014899552 @default.
- W2025571073 hasRelatedWork W2022778275 @default.
- W2025571073 hasRelatedWork W2052759331 @default.
- W2025571073 hasRelatedWork W2087392666 @default.
- W2025571073 hasRelatedWork W2093411990 @default.
- W2025571073 hasRelatedWork W2104984100 @default.
- W2025571073 hasRelatedWork W2129570663 @default.
- W2025571073 hasVolume "490" @default.
- W2025571073 isParatext "false" @default.
- W2025571073 isRetracted "false" @default.
- W2025571073 magId "2025571073" @default.
- W2025571073 workType "article" @default.