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- W2032094534 endingPage "213" @default.
- W2032094534 startingPage "210" @default.
- W2032094534 created "2016-06-24" @default.
- W2032094534 creator A5044450040 @default.
- W2032094534 creator A5075664968 @default.
- W2032094534 creator A5079910857 @default.
- W2032094534 creator A5091489118 @default.
- W2032094534 date "2000-11-27" @default.
- W2032094534 modified "2023-10-13" @default.
- W2032094534 title "Fabrication of sub-micron structures for MEMS using deep X-ray lithography" @default.
- W2032094534 doi "https://doi.org/10.1007/s005420000058" @default.
- W2032094534 hasPublicationYear "2000" @default.
- W2032094534 type Work @default.
- W2032094534 sameAs 2032094534 @default.
- W2032094534 citedByCount "2" @default.
- W2032094534 crossrefType "journal-article" @default.
- W2032094534 hasAuthorship W2032094534A5044450040 @default.
- W2032094534 hasAuthorship W2032094534A5075664968 @default.
- W2032094534 hasAuthorship W2032094534A5079910857 @default.
- W2032094534 hasAuthorship W2032094534A5091489118 @default.
- W2032094534 hasConcept C120665830 @default.
- W2032094534 hasConcept C121332964 @default.
- W2032094534 hasConcept C136525101 @default.
- W2032094534 hasConcept C142724271 @default.
- W2032094534 hasConcept C145695476 @default.
- W2032094534 hasConcept C159985019 @default.
- W2032094534 hasConcept C16332341 @default.
- W2032094534 hasConcept C163581340 @default.
- W2032094534 hasConcept C171250308 @default.
- W2032094534 hasConcept C192562407 @default.
- W2032094534 hasConcept C200274948 @default.
- W2032094534 hasConcept C204223013 @default.
- W2032094534 hasConcept C204787440 @default.
- W2032094534 hasConcept C2779227376 @default.
- W2032094534 hasConcept C37977207 @default.
- W2032094534 hasConcept C41794268 @default.
- W2032094534 hasConcept C49040817 @default.
- W2032094534 hasConcept C53524968 @default.
- W2032094534 hasConcept C71924100 @default.
- W2032094534 hasConcept C82558694 @default.
- W2032094534 hasConcept C87976508 @default.
- W2032094534 hasConceptScore W2032094534C120665830 @default.
- W2032094534 hasConceptScore W2032094534C121332964 @default.
- W2032094534 hasConceptScore W2032094534C136525101 @default.
- W2032094534 hasConceptScore W2032094534C142724271 @default.
- W2032094534 hasConceptScore W2032094534C145695476 @default.
- W2032094534 hasConceptScore W2032094534C159985019 @default.
- W2032094534 hasConceptScore W2032094534C16332341 @default.
- W2032094534 hasConceptScore W2032094534C163581340 @default.
- W2032094534 hasConceptScore W2032094534C171250308 @default.
- W2032094534 hasConceptScore W2032094534C192562407 @default.
- W2032094534 hasConceptScore W2032094534C200274948 @default.
- W2032094534 hasConceptScore W2032094534C204223013 @default.
- W2032094534 hasConceptScore W2032094534C204787440 @default.
- W2032094534 hasConceptScore W2032094534C2779227376 @default.
- W2032094534 hasConceptScore W2032094534C37977207 @default.
- W2032094534 hasConceptScore W2032094534C41794268 @default.
- W2032094534 hasConceptScore W2032094534C49040817 @default.
- W2032094534 hasConceptScore W2032094534C53524968 @default.
- W2032094534 hasConceptScore W2032094534C71924100 @default.
- W2032094534 hasConceptScore W2032094534C82558694 @default.
- W2032094534 hasConceptScore W2032094534C87976508 @default.
- W2032094534 hasIssue "6" @default.
- W2032094534 hasLocation W20320945341 @default.
- W2032094534 hasOpenAccess W2032094534 @default.
- W2032094534 hasPrimaryLocation W20320945341 @default.
- W2032094534 hasRelatedWork W1975156481 @default.
- W2032094534 hasRelatedWork W1976324500 @default.
- W2032094534 hasRelatedWork W2029365288 @default.
- W2032094534 hasRelatedWork W2032094534 @default.
- W2032094534 hasRelatedWork W2037063969 @default.
- W2032094534 hasRelatedWork W2051614709 @default.
- W2032094534 hasRelatedWork W2114831268 @default.
- W2032094534 hasRelatedWork W2120067851 @default.
- W2032094534 hasRelatedWork W2490370433 @default.
- W2032094534 hasRelatedWork W2470968409 @default.
- W2032094534 hasVolume "6" @default.
- W2032094534 isParatext "false" @default.
- W2032094534 isRetracted "false" @default.
- W2032094534 magId "2032094534" @default.
- W2032094534 workType "article" @default.