Matches in SemOpenAlex for { <https://semopenalex.org/work/W2035612064> ?p ?o ?g. }
Showing items 1 to 65 of
65
with 100 items per page.
- W2035612064 endingPage "124" @default.
- W2035612064 startingPage "117" @default.
- W2035612064 created "2016-06-24" @default.
- W2035612064 creator A5017282223 @default.
- W2035612064 creator A5021987468 @default.
- W2035612064 creator A5056887888 @default.
- W2035612064 creator A5057754530 @default.
- W2035612064 date "2019-12-21" @default.
- W2035612064 modified "2023-09-25" @default.
- W2035612064 title "Investigating the Role of Stress in SOG-filled Shallow-Trench-Isolation Structures of sub-70 nm Device" @default.
- W2035612064 doi "https://doi.org/10.1149/1.2218483" @default.
- W2035612064 hasPublicationYear "2019" @default.
- W2035612064 type Work @default.
- W2035612064 sameAs 2035612064 @default.
- W2035612064 citedByCount "4" @default.
- W2035612064 countsByYear W20356120642013 @default.
- W2035612064 countsByYear W20356120642014 @default.
- W2035612064 crossrefType "journal-article" @default.
- W2035612064 hasAuthorship W2035612064A5017282223 @default.
- W2035612064 hasAuthorship W2035612064A5021987468 @default.
- W2035612064 hasAuthorship W2035612064A5056887888 @default.
- W2035612064 hasAuthorship W2035612064A5057754530 @default.
- W2035612064 hasConcept C105066941 @default.
- W2035612064 hasConcept C127313418 @default.
- W2035612064 hasConcept C138885662 @default.
- W2035612064 hasConcept C155310634 @default.
- W2035612064 hasConcept C159985019 @default.
- W2035612064 hasConcept C192562407 @default.
- W2035612064 hasConcept C21036866 @default.
- W2035612064 hasConcept C2775941552 @default.
- W2035612064 hasConcept C2779227376 @default.
- W2035612064 hasConcept C41895202 @default.
- W2035612064 hasConcept C86803240 @default.
- W2035612064 hasConcept C89423630 @default.
- W2035612064 hasConceptScore W2035612064C105066941 @default.
- W2035612064 hasConceptScore W2035612064C127313418 @default.
- W2035612064 hasConceptScore W2035612064C138885662 @default.
- W2035612064 hasConceptScore W2035612064C155310634 @default.
- W2035612064 hasConceptScore W2035612064C159985019 @default.
- W2035612064 hasConceptScore W2035612064C192562407 @default.
- W2035612064 hasConceptScore W2035612064C21036866 @default.
- W2035612064 hasConceptScore W2035612064C2775941552 @default.
- W2035612064 hasConceptScore W2035612064C2779227376 @default.
- W2035612064 hasConceptScore W2035612064C41895202 @default.
- W2035612064 hasConceptScore W2035612064C86803240 @default.
- W2035612064 hasConceptScore W2035612064C89423630 @default.
- W2035612064 hasIssue "11" @default.
- W2035612064 hasLocation W20356120641 @default.
- W2035612064 hasOpenAccess W2035612064 @default.
- W2035612064 hasPrimaryLocation W20356120641 @default.
- W2035612064 hasRelatedWork W1924819016 @default.
- W2035612064 hasRelatedWork W1992381812 @default.
- W2035612064 hasRelatedWork W2037952736 @default.
- W2035612064 hasRelatedWork W2043422764 @default.
- W2035612064 hasRelatedWork W2134113845 @default.
- W2035612064 hasRelatedWork W2533445901 @default.
- W2035612064 hasRelatedWork W2534406307 @default.
- W2035612064 hasRelatedWork W2537798141 @default.
- W2035612064 hasRelatedWork W2545944103 @default.
- W2035612064 hasRelatedWork W4229695067 @default.
- W2035612064 hasVolume "1" @default.
- W2035612064 isParatext "false" @default.
- W2035612064 isRetracted "false" @default.
- W2035612064 magId "2035612064" @default.
- W2035612064 workType "article" @default.