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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2048878118> ?p ?o ?g. }

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• W2048878118 date "2001-01-01" @default.
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• W2048878118 title "Multi-Scale Simulations of Silicon Etching by Halides: Effects of Surface Reaction Rates." @default.
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• W2048878118 doi "https://doi.org/10.1557/proc-677-aa5.6" @default.
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