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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2066468541> ?p ?o ?g. }

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• W2066468541 date "2007-09-11" @default.
• W2066468541 modified "2023-09-26" @default.
• W2066468541 title "Influence of Oxygen Content on the Physical and Electrical Properties of Thin Yttrium Oxide Dielectrics Deposited by Reactive RF Sputtering on Si Substrates" @default.
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• W2066468541 doi "https://doi.org/10.1007/s11664-007-0250-1" @default.
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