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- W2068707620 endingPage "35" @default.
- W2068707620 startingPage "25" @default.
- W2068707620 created "2016-06-24" @default.
- W2068707620 creator A5029582576 @default.
- W2068707620 creator A5070459868 @default.
- W2068707620 date "1974-02-01" @default.
- W2068707620 modified "2023-09-24" @default.
- W2068707620 title "A stabilized tantalum diffusion barrier for the gold metallization system" @default.
- W2068707620 cites W1663513239 @default.
- W2068707620 cites W1991597426 @default.
- W2068707620 cites W2001881989 @default.
- W2068707620 cites W2028878533 @default.
- W2068707620 cites W2059811851 @default.
- W2068707620 doi "https://doi.org/10.1007/bf02654544" @default.
- W2068707620 hasPublicationYear "1974" @default.
- W2068707620 type Work @default.
- W2068707620 sameAs 2068707620 @default.
- W2068707620 citedByCount "3" @default.
- W2068707620 crossrefType "journal-article" @default.
- W2068707620 hasAuthorship W2068707620A5029582576 @default.
- W2068707620 hasAuthorship W2068707620A5070459868 @default.
- W2068707620 hasConcept C121332964 @default.
- W2068707620 hasConcept C159985019 @default.
- W2068707620 hasConcept C18168003 @default.
- W2068707620 hasConcept C191897082 @default.
- W2068707620 hasConcept C192562407 @default.
- W2068707620 hasConcept C193341735 @default.
- W2068707620 hasConcept C20625102 @default.
- W2068707620 hasConcept C2778112282 @default.
- W2068707620 hasConcept C2778836790 @default.
- W2068707620 hasConcept C2779227376 @default.
- W2068707620 hasConcept C2780026712 @default.
- W2068707620 hasConcept C47908070 @default.
- W2068707620 hasConcept C514619126 @default.
- W2068707620 hasConcept C544153396 @default.
- W2068707620 hasConcept C544956773 @default.
- W2068707620 hasConcept C69357855 @default.
- W2068707620 hasConcept C87976508 @default.
- W2068707620 hasConcept C97355855 @default.
- W2068707620 hasConceptScore W2068707620C121332964 @default.
- W2068707620 hasConceptScore W2068707620C159985019 @default.
- W2068707620 hasConceptScore W2068707620C18168003 @default.
- W2068707620 hasConceptScore W2068707620C191897082 @default.
- W2068707620 hasConceptScore W2068707620C192562407 @default.
- W2068707620 hasConceptScore W2068707620C193341735 @default.
- W2068707620 hasConceptScore W2068707620C20625102 @default.
- W2068707620 hasConceptScore W2068707620C2778112282 @default.
- W2068707620 hasConceptScore W2068707620C2778836790 @default.
- W2068707620 hasConceptScore W2068707620C2779227376 @default.
- W2068707620 hasConceptScore W2068707620C2780026712 @default.
- W2068707620 hasConceptScore W2068707620C47908070 @default.
- W2068707620 hasConceptScore W2068707620C514619126 @default.
- W2068707620 hasConceptScore W2068707620C544153396 @default.
- W2068707620 hasConceptScore W2068707620C544956773 @default.
- W2068707620 hasConceptScore W2068707620C69357855 @default.
- W2068707620 hasConceptScore W2068707620C87976508 @default.
- W2068707620 hasConceptScore W2068707620C97355855 @default.
- W2068707620 hasIssue "1" @default.
- W2068707620 hasLocation W20687076201 @default.
- W2068707620 hasOpenAccess W2068707620 @default.
- W2068707620 hasPrimaryLocation W20687076201 @default.
- W2068707620 hasRelatedWork W1998444532 @default.
- W2068707620 hasRelatedWork W2026622689 @default.
- W2068707620 hasRelatedWork W2036668084 @default.
- W2068707620 hasRelatedWork W2039739525 @default.
- W2068707620 hasRelatedWork W2352982341 @default.
- W2068707620 hasRelatedWork W2357144998 @default.
- W2068707620 hasRelatedWork W2375688750 @default.
- W2068707620 hasRelatedWork W2376938014 @default.
- W2068707620 hasRelatedWork W3097783663 @default.
- W2068707620 hasRelatedWork W4362455380 @default.
- W2068707620 hasVolume "3" @default.
- W2068707620 isParatext "false" @default.
- W2068707620 isRetracted "false" @default.
- W2068707620 magId "2068707620" @default.
- W2068707620 workType "article" @default.