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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2073373743> ?p ?o ?g. }

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• W2073373743 date "2014-03-25" @default.
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• W2073373743 title "Depth-resolved impact of integration process on porosity and solvent diffusion in a SiOCH low-k material" @default.
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