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- W2078195813 endingPage "1293" @default.
- W2078195813 startingPage "1293b" @default.
- W2078195813 created "2016-06-24" @default.
- W2078195813 creator A5060071355 @default.
- W2078195813 date "2003-09-05" @default.
- W2078195813 modified "2023-09-25" @default.
- W2078195813 title "APPLIED PHYSICS: Accelerating Lithography" @default.
- W2078195813 doi "https://doi.org/10.1126/science.301.5638.1293b" @default.
- W2078195813 hasPublicationYear "2003" @default.
- W2078195813 type Work @default.
- W2078195813 sameAs 2078195813 @default.
- W2078195813 citedByCount "0" @default.
- W2078195813 crossrefType "journal-article" @default.
- W2078195813 hasAuthorship W2078195813A5060071355 @default.
- W2078195813 hasConcept C120665830 @default.
- W2078195813 hasConcept C121332964 @default.
- W2078195813 hasConcept C171250308 @default.
- W2078195813 hasConcept C192562407 @default.
- W2078195813 hasConcept C204223013 @default.
- W2078195813 hasConceptScore W2078195813C120665830 @default.
- W2078195813 hasConceptScore W2078195813C121332964 @default.
- W2078195813 hasConceptScore W2078195813C171250308 @default.
- W2078195813 hasConceptScore W2078195813C192562407 @default.
- W2078195813 hasConceptScore W2078195813C204223013 @default.
- W2078195813 hasIssue "5638" @default.
- W2078195813 hasLocation W20781958131 @default.
- W2078195813 hasOpenAccess W2078195813 @default.
- W2078195813 hasPrimaryLocation W20781958131 @default.
- W2078195813 hasRelatedWork W178758932 @default.
- W2078195813 hasRelatedWork W1994078670 @default.
- W2078195813 hasRelatedWork W2003891573 @default.
- W2078195813 hasRelatedWork W2039969115 @default.
- W2078195813 hasRelatedWork W2094656325 @default.
- W2078195813 hasRelatedWork W2136838694 @default.
- W2078195813 hasRelatedWork W2156096016 @default.
- W2078195813 hasRelatedWork W2395305396 @default.
- W2078195813 hasRelatedWork W3094579937 @default.
- W2078195813 hasRelatedWork W3158953259 @default.
- W2078195813 hasVolume "301" @default.
- W2078195813 isParatext "false" @default.
- W2078195813 isRetracted "false" @default.
- W2078195813 magId "2078195813" @default.
- W2078195813 workType "article" @default.