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- W2092116427 endingPage "316" @default.
- W2092116427 startingPage "315" @default.
- W2092116427 created "2016-06-24" @default.
- W2092116427 creator A5019687677 @default.
- W2092116427 creator A5039652877 @default.
- W2092116427 creator A5062132147 @default.
- W2092116427 creator A5062415158 @default.
- W2092116427 creator A5081851904 @default.
- W2092116427 creator A5088045011 @default.
- W2092116427 date "1993-01-01" @default.
- W2092116427 modified "2023-10-17" @default.
- W2092116427 title "The effects of polymer undercoats on the pattern profile of chemically amplified resists." @default.
- W2092116427 doi "https://doi.org/10.2494/photopolymer.6.315" @default.
- W2092116427 hasPublicationYear "1993" @default.
- W2092116427 type Work @default.
- W2092116427 sameAs 2092116427 @default.
- W2092116427 citedByCount "1" @default.
- W2092116427 crossrefType "journal-article" @default.
- W2092116427 hasAuthorship W2092116427A5019687677 @default.
- W2092116427 hasAuthorship W2092116427A5039652877 @default.
- W2092116427 hasAuthorship W2092116427A5062132147 @default.
- W2092116427 hasAuthorship W2092116427A5062415158 @default.
- W2092116427 hasAuthorship W2092116427A5081851904 @default.
- W2092116427 hasAuthorship W2092116427A5088045011 @default.
- W2092116427 hasBestOaLocation W20921164271 @default.
- W2092116427 hasConcept C126348684 @default.
- W2092116427 hasConcept C159985019 @default.
- W2092116427 hasConcept C171250308 @default.
- W2092116427 hasConcept C192562407 @default.
- W2092116427 hasConcept C2779227376 @default.
- W2092116427 hasConcept C521977710 @default.
- W2092116427 hasConcept C53524968 @default.
- W2092116427 hasConceptScore W2092116427C126348684 @default.
- W2092116427 hasConceptScore W2092116427C159985019 @default.
- W2092116427 hasConceptScore W2092116427C171250308 @default.
- W2092116427 hasConceptScore W2092116427C192562407 @default.
- W2092116427 hasConceptScore W2092116427C2779227376 @default.
- W2092116427 hasConceptScore W2092116427C521977710 @default.
- W2092116427 hasConceptScore W2092116427C53524968 @default.
- W2092116427 hasIssue "2" @default.
- W2092116427 hasLocation W20921164271 @default.
- W2092116427 hasOpenAccess W2092116427 @default.
- W2092116427 hasPrimaryLocation W20921164271 @default.
- W2092116427 hasRelatedWork W1977924873 @default.
- W2092116427 hasRelatedWork W1987563355 @default.
- W2092116427 hasRelatedWork W2038207996 @default.
- W2092116427 hasRelatedWork W2065384292 @default.
- W2092116427 hasRelatedWork W2073459230 @default.
- W2092116427 hasRelatedWork W2088899554 @default.
- W2092116427 hasRelatedWork W2090089314 @default.
- W2092116427 hasRelatedWork W2095155031 @default.
- W2092116427 hasRelatedWork W2949592704 @default.
- W2092116427 hasRelatedWork W4229529819 @default.
- W2092116427 hasVolume "6" @default.
- W2092116427 isParatext "false" @default.
- W2092116427 isRetracted "false" @default.
- W2092116427 magId "2092116427" @default.
- W2092116427 workType "article" @default.