Matches in SemOpenAlex for { <https://semopenalex.org/work/W2097900844> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2097900844 created "2016-06-24" @default.
- W2097900844 creator A5003373729 @default.
- W2097900844 creator A5036059745 @default.
- W2097900844 creator A5054981149 @default.
- W2097900844 creator A5072968767 @default.
- W2097900844 creator A5086026074 @default.
- W2097900844 date "1991-01-01" @default.
- W2097900844 modified "2023-09-28" @default.
- W2097900844 title "Submicron Mechanically Planarized Shallow Trench Isolation With Field Shield" @default.
- W2097900844 cites W1982038962 @default.
- W2097900844 cites W2158544420 @default.
- W2097900844 doi "https://doi.org/10.1109/vlsit.1991.706004" @default.
- W2097900844 hasPublicationYear "1991" @default.
- W2097900844 type Work @default.
- W2097900844 sameAs 2097900844 @default.
- W2097900844 citedByCount "4" @default.
- W2097900844 crossrefType "proceedings-article" @default.
- W2097900844 hasAuthorship W2097900844A5003373729 @default.
- W2097900844 hasAuthorship W2097900844A5036059745 @default.
- W2097900844 hasAuthorship W2097900844A5054981149 @default.
- W2097900844 hasAuthorship W2097900844A5072968767 @default.
- W2097900844 hasAuthorship W2097900844A5086026074 @default.
- W2097900844 hasConcept C105066941 @default.
- W2097900844 hasConcept C127313418 @default.
- W2097900844 hasConcept C138081364 @default.
- W2097900844 hasConcept C138113353 @default.
- W2097900844 hasConcept C155310634 @default.
- W2097900844 hasConcept C159985019 @default.
- W2097900844 hasConcept C180088628 @default.
- W2097900844 hasConcept C192562407 @default.
- W2097900844 hasConcept C202444582 @default.
- W2097900844 hasConcept C2775941552 @default.
- W2097900844 hasConcept C2779227376 @default.
- W2097900844 hasConcept C33923547 @default.
- W2097900844 hasConcept C49040817 @default.
- W2097900844 hasConcept C5900021 @default.
- W2097900844 hasConcept C86803240 @default.
- W2097900844 hasConcept C89423630 @default.
- W2097900844 hasConcept C9652623 @default.
- W2097900844 hasConceptScore W2097900844C105066941 @default.
- W2097900844 hasConceptScore W2097900844C127313418 @default.
- W2097900844 hasConceptScore W2097900844C138081364 @default.
- W2097900844 hasConceptScore W2097900844C138113353 @default.
- W2097900844 hasConceptScore W2097900844C155310634 @default.
- W2097900844 hasConceptScore W2097900844C159985019 @default.
- W2097900844 hasConceptScore W2097900844C180088628 @default.
- W2097900844 hasConceptScore W2097900844C192562407 @default.
- W2097900844 hasConceptScore W2097900844C202444582 @default.
- W2097900844 hasConceptScore W2097900844C2775941552 @default.
- W2097900844 hasConceptScore W2097900844C2779227376 @default.
- W2097900844 hasConceptScore W2097900844C33923547 @default.
- W2097900844 hasConceptScore W2097900844C49040817 @default.
- W2097900844 hasConceptScore W2097900844C5900021 @default.
- W2097900844 hasConceptScore W2097900844C86803240 @default.
- W2097900844 hasConceptScore W2097900844C89423630 @default.
- W2097900844 hasConceptScore W2097900844C9652623 @default.
- W2097900844 hasLocation W20979008441 @default.
- W2097900844 hasOpenAccess W2097900844 @default.
- W2097900844 hasPrimaryLocation W20979008441 @default.
- W2097900844 hasRelatedWork W1494218249 @default.
- W2097900844 hasRelatedWork W1529075923 @default.
- W2097900844 hasRelatedWork W1547738439 @default.
- W2097900844 hasRelatedWork W1872030092 @default.
- W2097900844 hasRelatedWork W1987127021 @default.
- W2097900844 hasRelatedWork W1987597606 @default.
- W2097900844 hasRelatedWork W2040177836 @default.
- W2097900844 hasRelatedWork W2043172974 @default.
- W2097900844 hasRelatedWork W2043180671 @default.
- W2097900844 hasRelatedWork W2056288153 @default.
- W2097900844 hasRelatedWork W2079276677 @default.
- W2097900844 hasRelatedWork W2101880328 @default.
- W2097900844 hasRelatedWork W2119814266 @default.
- W2097900844 hasRelatedWork W2148303047 @default.
- W2097900844 hasRelatedWork W2153911340 @default.
- W2097900844 hasRelatedWork W2163264656 @default.
- W2097900844 hasRelatedWork W2288831037 @default.
- W2097900844 hasRelatedWork W2320268575 @default.
- W2097900844 hasRelatedWork W2528785063 @default.
- W2097900844 hasRelatedWork W2853124614 @default.
- W2097900844 isParatext "false" @default.
- W2097900844 isRetracted "false" @default.
- W2097900844 magId "2097900844" @default.
- W2097900844 workType "article" @default.