Matches in SemOpenAlex for { <https://semopenalex.org/work/W2110784894> ?p ?o ?g. }
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- W2110784894 endingPage "1063" @default.
- W2110784894 startingPage "1057" @default.
- W2110784894 created "2016-06-24" @default.
- W2110784894 creator A5029882541 @default.
- W2110784894 creator A5041199643 @default.
- W2110784894 creator A5059118347 @default.
- W2110784894 creator A5067940110 @default.
- W2110784894 creator A5070708079 @default.
- W2110784894 creator A5084411423 @default.
- W2110784894 creator A5090044265 @default.
- W2110784894 date "2012-02-07" @default.
- W2110784894 modified "2023-10-16" @default.
- W2110784894 title "Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applications" @default.
- W2110784894 cites W1966548041 @default.
- W2110784894 cites W1983449952 @default.
- W2110784894 cites W1993990397 @default.
- W2110784894 cites W2036313051 @default.
- W2110784894 cites W2042857163 @default.
- W2110784894 cites W2071300841 @default.
- W2110784894 cites W2105180072 @default.
- W2110784894 cites W2109801454 @default.
- W2110784894 cites W2144922387 @default.
- W2110784894 cites W2150792693 @default.
- W2110784894 cites W2162908599 @default.
- W2110784894 doi "https://doi.org/10.1007/s00542-012-1438-8" @default.
- W2110784894 hasPublicationYear "2012" @default.
- W2110784894 type Work @default.
- W2110784894 sameAs 2110784894 @default.
- W2110784894 citedByCount "2" @default.
- W2110784894 countsByYear W21107848942012 @default.
- W2110784894 countsByYear W21107848942019 @default.
- W2110784894 crossrefType "journal-article" @default.
- W2110784894 hasAuthorship W2110784894A5029882541 @default.
- W2110784894 hasAuthorship W2110784894A5041199643 @default.
- W2110784894 hasAuthorship W2110784894A5059118347 @default.
- W2110784894 hasAuthorship W2110784894A5067940110 @default.
- W2110784894 hasAuthorship W2110784894A5070708079 @default.
- W2110784894 hasAuthorship W2110784894A5084411423 @default.
- W2110784894 hasAuthorship W2110784894A5090044265 @default.
- W2110784894 hasConcept C100460472 @default.
- W2110784894 hasConcept C120665830 @default.
- W2110784894 hasConcept C121332964 @default.
- W2110784894 hasConcept C124634506 @default.
- W2110784894 hasConcept C130472188 @default.
- W2110784894 hasConcept C159985019 @default.
- W2110784894 hasConcept C160671074 @default.
- W2110784894 hasConcept C184050105 @default.
- W2110784894 hasConcept C192562407 @default.
- W2110784894 hasConcept C204223013 @default.
- W2110784894 hasConcept C2777441419 @default.
- W2110784894 hasConcept C2779227376 @default.
- W2110784894 hasConcept C49040817 @default.
- W2110784894 hasConcept C544956773 @default.
- W2110784894 hasConcept C85725439 @default.
- W2110784894 hasConceptScore W2110784894C100460472 @default.
- W2110784894 hasConceptScore W2110784894C120665830 @default.
- W2110784894 hasConceptScore W2110784894C121332964 @default.
- W2110784894 hasConceptScore W2110784894C124634506 @default.
- W2110784894 hasConceptScore W2110784894C130472188 @default.
- W2110784894 hasConceptScore W2110784894C159985019 @default.
- W2110784894 hasConceptScore W2110784894C160671074 @default.
- W2110784894 hasConceptScore W2110784894C184050105 @default.
- W2110784894 hasConceptScore W2110784894C192562407 @default.
- W2110784894 hasConceptScore W2110784894C204223013 @default.
- W2110784894 hasConceptScore W2110784894C2777441419 @default.
- W2110784894 hasConceptScore W2110784894C2779227376 @default.
- W2110784894 hasConceptScore W2110784894C49040817 @default.
- W2110784894 hasConceptScore W2110784894C544956773 @default.
- W2110784894 hasConceptScore W2110784894C85725439 @default.
- W2110784894 hasIssue "7-8" @default.
- W2110784894 hasLocation W21107848941 @default.
- W2110784894 hasOpenAccess W2110784894 @default.
- W2110784894 hasPrimaryLocation W21107848941 @default.
- W2110784894 hasRelatedWork W1966986027 @default.
- W2110784894 hasRelatedWork W1972230366 @default.
- W2110784894 hasRelatedWork W2000849966 @default.
- W2110784894 hasRelatedWork W2055095209 @default.
- W2110784894 hasRelatedWork W2095869416 @default.
- W2110784894 hasRelatedWork W2110784894 @default.
- W2110784894 hasRelatedWork W2112558574 @default.
- W2110784894 hasRelatedWork W2164353131 @default.
- W2110784894 hasRelatedWork W628644841 @default.
- W2110784894 hasRelatedWork W3186924502 @default.
- W2110784894 hasVolume "18" @default.
- W2110784894 isParatext "false" @default.
- W2110784894 isRetracted "false" @default.
- W2110784894 magId "2110784894" @default.
- W2110784894 workType "article" @default.