Matches in SemOpenAlex for { <https://semopenalex.org/work/W2118110521> ?p ?o ?g. }
Showing items 1 to 53 of
53
with 100 items per page.
- W2118110521 endingPage "95" @default.
- W2118110521 startingPage "95" @default.
- W2118110521 created "2016-06-24" @default.
- W2118110521 creator A5013475838 @default.
- W2118110521 creator A5038142263 @default.
- W2118110521 creator A5042574279 @default.
- W2118110521 creator A5056174720 @default.
- W2118110521 date "1999-01-01" @default.
- W2118110521 modified "2023-09-27" @default.
- W2118110521 title "Chemical Mechanical Polishing of Ta" @default.
- W2118110521 doi "https://doi.org/10.1149/1.1390969" @default.
- W2118110521 hasPublicationYear "1999" @default.
- W2118110521 type Work @default.
- W2118110521 sameAs 2118110521 @default.
- W2118110521 citedByCount "29" @default.
- W2118110521 countsByYear W21181105212015 @default.
- W2118110521 countsByYear W21181105212017 @default.
- W2118110521 countsByYear W21181105212020 @default.
- W2118110521 countsByYear W21181105212021 @default.
- W2118110521 crossrefType "journal-article" @default.
- W2118110521 hasAuthorship W2118110521A5013475838 @default.
- W2118110521 hasAuthorship W2118110521A5038142263 @default.
- W2118110521 hasAuthorship W2118110521A5042574279 @default.
- W2118110521 hasAuthorship W2118110521A5056174720 @default.
- W2118110521 hasConcept C138113353 @default.
- W2118110521 hasConcept C159985019 @default.
- W2118110521 hasConcept C180088628 @default.
- W2118110521 hasConcept C191897082 @default.
- W2118110521 hasConcept C192562407 @default.
- W2118110521 hasConceptScore W2118110521C138113353 @default.
- W2118110521 hasConceptScore W2118110521C159985019 @default.
- W2118110521 hasConceptScore W2118110521C180088628 @default.
- W2118110521 hasConceptScore W2118110521C191897082 @default.
- W2118110521 hasConceptScore W2118110521C192562407 @default.
- W2118110521 hasIssue "2" @default.
- W2118110521 hasLocation W21181105211 @default.
- W2118110521 hasOpenAccess W2118110521 @default.
- W2118110521 hasPrimaryLocation W21181105211 @default.
- W2118110521 hasRelatedWork W2047359905 @default.
- W2118110521 hasRelatedWork W2090397631 @default.
- W2118110521 hasRelatedWork W2103697926 @default.
- W2118110521 hasRelatedWork W2154293465 @default.
- W2118110521 hasRelatedWork W2299493852 @default.
- W2118110521 hasRelatedWork W2356503802 @default.
- W2118110521 hasRelatedWork W2366681927 @default.
- W2118110521 hasRelatedWork W2378882722 @default.
- W2118110521 hasRelatedWork W2498038632 @default.
- W2118110521 hasRelatedWork W4232864957 @default.
- W2118110521 hasVolume "3" @default.
- W2118110521 isParatext "false" @default.
- W2118110521 isRetracted "false" @default.
- W2118110521 magId "2118110521" @default.
- W2118110521 workType "article" @default.