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- W2127744021 created "2016-06-24" @default.
- W2127744021 creator A5051756799 @default.
- W2127744021 creator A5053352067 @default.
- W2127744021 creator A5072899441 @default.
- W2127744021 creator A5076911620 @default.
- W2127744021 creator A5089066074 @default.
- W2127744021 date "2009-11-04" @default.
- W2127744021 modified "2023-10-08" @default.
- W2127744021 title "Impact of low pressure plasma discharge on etch rate of SiO$_{2 }$wafer" @default.
- W2127744021 hasPublicationYear "2009" @default.
- W2127744021 type Work @default.
- W2127744021 sameAs 2127744021 @default.
- W2127744021 citedByCount "0" @default.
- W2127744021 crossrefType "journal-article" @default.
- W2127744021 hasAuthorship W2127744021A5051756799 @default.
- W2127744021 hasAuthorship W2127744021A5053352067 @default.
- W2127744021 hasAuthorship W2127744021A5072899441 @default.
- W2127744021 hasAuthorship W2127744021A5076911620 @default.
- W2127744021 hasAuthorship W2127744021A5089066074 @default.
- W2127744021 hasConcept C100460472 @default.
- W2127744021 hasConcept C121332964 @default.
- W2127744021 hasConcept C159985019 @default.
- W2127744021 hasConcept C160671074 @default.
- W2127744021 hasConcept C185544564 @default.
- W2127744021 hasConcept C192562407 @default.
- W2127744021 hasConcept C2779227376 @default.
- W2127744021 hasConcept C49040817 @default.
- W2127744021 hasConcept C60581705 @default.
- W2127744021 hasConcept C81626474 @default.
- W2127744021 hasConcept C82706917 @default.
- W2127744021 hasConceptScore W2127744021C100460472 @default.
- W2127744021 hasConceptScore W2127744021C121332964 @default.
- W2127744021 hasConceptScore W2127744021C159985019 @default.
- W2127744021 hasConceptScore W2127744021C160671074 @default.
- W2127744021 hasConceptScore W2127744021C185544564 @default.
- W2127744021 hasConceptScore W2127744021C192562407 @default.
- W2127744021 hasConceptScore W2127744021C2779227376 @default.
- W2127744021 hasConceptScore W2127744021C49040817 @default.
- W2127744021 hasConceptScore W2127744021C60581705 @default.
- W2127744021 hasConceptScore W2127744021C81626474 @default.
- W2127744021 hasConceptScore W2127744021C82706917 @default.
- W2127744021 hasLocation W21277440211 @default.
- W2127744021 hasOpenAccess W2127744021 @default.
- W2127744021 hasPrimaryLocation W21277440211 @default.
- W2127744021 hasRelatedWork W1609787373 @default.
- W2127744021 hasRelatedWork W175137686 @default.
- W2127744021 hasRelatedWork W1956607536 @default.
- W2127744021 hasRelatedWork W1975267305 @default.
- W2127744021 hasRelatedWork W1986868360 @default.
- W2127744021 hasRelatedWork W1990549998 @default.
- W2127744021 hasRelatedWork W2023107509 @default.
- W2127744021 hasRelatedWork W2025884423 @default.
- W2127744021 hasRelatedWork W2031434171 @default.
- W2127744021 hasRelatedWork W2034184378 @default.
- W2127744021 hasRelatedWork W2055993378 @default.
- W2127744021 hasRelatedWork W2065108417 @default.
- W2127744021 hasRelatedWork W2087535049 @default.
- W2127744021 hasRelatedWork W2088430905 @default.
- W2127744021 hasRelatedWork W2229162675 @default.
- W2127744021 hasRelatedWork W2332230386 @default.
- W2127744021 hasRelatedWork W2920452938 @default.
- W2127744021 hasRelatedWork W2995098401 @default.
- W2127744021 hasRelatedWork W50977855 @default.
- W2127744021 hasRelatedWork W2296589054 @default.
- W2127744021 hasVolume "51" @default.
- W2127744021 isParatext "false" @default.
- W2127744021 isRetracted "false" @default.
- W2127744021 magId "2127744021" @default.
- W2127744021 workType "article" @default.