Matches in SemOpenAlex for { <https://semopenalex.org/work/W2137282847> ?p ?o ?g. }
- W2137282847 created "2016-06-24" @default.
- W2137282847 creator A5010087310 @default.
- W2137282847 creator A5042151387 @default.
- W2137282847 creator A5072680252 @default.
- W2137282847 creator A5085390001 @default.
- W2137282847 creator A5086979571 @default.
- W2137282847 date "2002-01-01" @default.
- W2137282847 modified "2023-10-18" @default.
- W2137282847 title "Surface Roughness Evolution in Amorphous Tantalum Oxide Films Deposited by Pulsed Reactive Sputtering" @default.
- W2137282847 cites W1983833418 @default.
- W2137282847 cites W1993283454 @default.
- W2137282847 cites W1994441974 @default.
- W2137282847 cites W2004881028 @default.
- W2137282847 cites W2011835404 @default.
- W2137282847 cites W2014866381 @default.
- W2137282847 cites W2018017211 @default.
- W2137282847 cites W2024670891 @default.
- W2137282847 cites W2030367837 @default.
- W2137282847 cites W2038274823 @default.
- W2137282847 cites W2043363586 @default.
- W2137282847 cites W2055162327 @default.
- W2137282847 cites W2063567496 @default.
- W2137282847 cites W2066934721 @default.
- W2137282847 cites W2118529238 @default.
- W2137282847 cites W2122148363 @default.
- W2137282847 cites W2123896946 @default.
- W2137282847 cites W2164571652 @default.
- W2137282847 cites W2977474616 @default.
- W2137282847 cites W591468295 @default.
- W2137282847 doi "https://doi.org/10.1557/proc-749-w5.11" @default.
- W2137282847 hasPublicationYear "2002" @default.
- W2137282847 type Work @default.
- W2137282847 sameAs 2137282847 @default.
- W2137282847 citedByCount "1" @default.
- W2137282847 crossrefType "journal-article" @default.
- W2137282847 hasAuthorship W2137282847A5010087310 @default.
- W2137282847 hasAuthorship W2137282847A5042151387 @default.
- W2137282847 hasAuthorship W2137282847A5072680252 @default.
- W2137282847 hasAuthorship W2137282847A5085390001 @default.
- W2137282847 hasAuthorship W2137282847A5086979571 @default.
- W2137282847 hasConcept C107365816 @default.
- W2137282847 hasConcept C113196181 @default.
- W2137282847 hasConcept C121332964 @default.
- W2137282847 hasConcept C147789679 @default.
- W2137282847 hasConcept C150394285 @default.
- W2137282847 hasConcept C151730666 @default.
- W2137282847 hasConcept C15696416 @default.
- W2137282847 hasConcept C159985019 @default.
- W2137282847 hasConcept C162711632 @default.
- W2137282847 hasConcept C171250308 @default.
- W2137282847 hasConcept C185592680 @default.
- W2137282847 hasConcept C19067145 @default.
- W2137282847 hasConcept C191897082 @default.
- W2137282847 hasConcept C192562407 @default.
- W2137282847 hasConcept C22423302 @default.
- W2137282847 hasConcept C2816523 @default.
- W2137282847 hasConcept C43617362 @default.
- W2137282847 hasConcept C514619126 @default.
- W2137282847 hasConcept C56052488 @default.
- W2137282847 hasConcept C61427134 @default.
- W2137282847 hasConcept C64297162 @default.
- W2137282847 hasConcept C68709404 @default.
- W2137282847 hasConcept C69357855 @default.
- W2137282847 hasConcept C71039073 @default.
- W2137282847 hasConcept C8010536 @default.
- W2137282847 hasConcept C86803240 @default.
- W2137282847 hasConcept C97355855 @default.
- W2137282847 hasConcept C9950777 @default.
- W2137282847 hasConceptScore W2137282847C107365816 @default.
- W2137282847 hasConceptScore W2137282847C113196181 @default.
- W2137282847 hasConceptScore W2137282847C121332964 @default.
- W2137282847 hasConceptScore W2137282847C147789679 @default.
- W2137282847 hasConceptScore W2137282847C150394285 @default.
- W2137282847 hasConceptScore W2137282847C151730666 @default.
- W2137282847 hasConceptScore W2137282847C15696416 @default.
- W2137282847 hasConceptScore W2137282847C159985019 @default.
- W2137282847 hasConceptScore W2137282847C162711632 @default.
- W2137282847 hasConceptScore W2137282847C171250308 @default.
- W2137282847 hasConceptScore W2137282847C185592680 @default.
- W2137282847 hasConceptScore W2137282847C19067145 @default.
- W2137282847 hasConceptScore W2137282847C191897082 @default.
- W2137282847 hasConceptScore W2137282847C192562407 @default.
- W2137282847 hasConceptScore W2137282847C22423302 @default.
- W2137282847 hasConceptScore W2137282847C2816523 @default.
- W2137282847 hasConceptScore W2137282847C43617362 @default.
- W2137282847 hasConceptScore W2137282847C514619126 @default.
- W2137282847 hasConceptScore W2137282847C56052488 @default.
- W2137282847 hasConceptScore W2137282847C61427134 @default.
- W2137282847 hasConceptScore W2137282847C64297162 @default.
- W2137282847 hasConceptScore W2137282847C68709404 @default.
- W2137282847 hasConceptScore W2137282847C69357855 @default.
- W2137282847 hasConceptScore W2137282847C71039073 @default.
- W2137282847 hasConceptScore W2137282847C8010536 @default.
- W2137282847 hasConceptScore W2137282847C86803240 @default.
- W2137282847 hasConceptScore W2137282847C97355855 @default.
- W2137282847 hasConceptScore W2137282847C9950777 @default.
- W2137282847 hasLocation W21372828471 @default.
- W2137282847 hasOpenAccess W2137282847 @default.
- W2137282847 hasPrimaryLocation W21372828471 @default.
- W2137282847 hasRelatedWork W1974226862 @default.