Matches in SemOpenAlex for { <https://semopenalex.org/work/W2153344070> ?p ?o ?g. }
Showing items 1 to 63 of
63
with 100 items per page.
- W2153344070 created "2016-06-24" @default.
- W2153344070 creator A5011364844 @default.
- W2153344070 creator A5052731892 @default.
- W2153344070 creator A5087649747 @default.
- W2153344070 date "2019-12-18" @default.
- W2153344070 modified "2023-10-03" @default.
- W2153344070 title "Bird's Beak and Thermally Induced Stress Defects Evaluations of LOCOS Structures Fabricated Using ECR-CVD SiNx Without Pad Oxide" @default.
- W2153344070 doi "https://doi.org/10.1149/1.2956054" @default.
- W2153344070 hasPublicationYear "2019" @default.
- W2153344070 type Work @default.
- W2153344070 sameAs 2153344070 @default.
- W2153344070 citedByCount "0" @default.
- W2153344070 crossrefType "journal-article" @default.
- W2153344070 hasAuthorship W2153344070A5011364844 @default.
- W2153344070 hasAuthorship W2153344070A5052731892 @default.
- W2153344070 hasAuthorship W2153344070A5087649747 @default.
- W2153344070 hasConcept C138885662 @default.
- W2153344070 hasConcept C151730666 @default.
- W2153344070 hasConcept C159985019 @default.
- W2153344070 hasConcept C171250308 @default.
- W2153344070 hasConcept C191897082 @default.
- W2153344070 hasConcept C192562407 @default.
- W2153344070 hasConcept C195114451 @default.
- W2153344070 hasConcept C21036866 @default.
- W2153344070 hasConcept C2777431650 @default.
- W2153344070 hasConcept C2778004798 @default.
- W2153344070 hasConcept C2779851234 @default.
- W2153344070 hasConcept C41895202 @default.
- W2153344070 hasConcept C49040817 @default.
- W2153344070 hasConcept C544956773 @default.
- W2153344070 hasConcept C86803240 @default.
- W2153344070 hasConceptScore W2153344070C138885662 @default.
- W2153344070 hasConceptScore W2153344070C151730666 @default.
- W2153344070 hasConceptScore W2153344070C159985019 @default.
- W2153344070 hasConceptScore W2153344070C171250308 @default.
- W2153344070 hasConceptScore W2153344070C191897082 @default.
- W2153344070 hasConceptScore W2153344070C192562407 @default.
- W2153344070 hasConceptScore W2153344070C195114451 @default.
- W2153344070 hasConceptScore W2153344070C21036866 @default.
- W2153344070 hasConceptScore W2153344070C2777431650 @default.
- W2153344070 hasConceptScore W2153344070C2778004798 @default.
- W2153344070 hasConceptScore W2153344070C2779851234 @default.
- W2153344070 hasConceptScore W2153344070C41895202 @default.
- W2153344070 hasConceptScore W2153344070C49040817 @default.
- W2153344070 hasConceptScore W2153344070C544956773 @default.
- W2153344070 hasConceptScore W2153344070C86803240 @default.
- W2153344070 hasLocation W21533440701 @default.
- W2153344070 hasOpenAccess W2153344070 @default.
- W2153344070 hasPrimaryLocation W21533440701 @default.
- W2153344070 hasRelatedWork W15270766 @default.
- W2153344070 hasRelatedWork W19453105 @default.
- W2153344070 hasRelatedWork W22061219 @default.
- W2153344070 hasRelatedWork W29478450 @default.
- W2153344070 hasRelatedWork W32213333 @default.
- W2153344070 hasRelatedWork W33935438 @default.
- W2153344070 hasRelatedWork W37248558 @default.
- W2153344070 hasRelatedWork W42365985 @default.
- W2153344070 hasRelatedWork W4778135 @default.
- W2153344070 hasRelatedWork W50872900 @default.
- W2153344070 isParatext "false" @default.
- W2153344070 isRetracted "false" @default.
- W2153344070 magId "2153344070" @default.
- W2153344070 workType "article" @default.