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- W2154164287 created "2016-06-24" @default.
- W2154164287 creator A5016476824 @default.
- W2154164287 creator A5023656099 @default.
- W2154164287 creator A5025402803 @default.
- W2154164287 creator A5052691144 @default.
- W2154164287 creator A5065435871 @default.
- W2154164287 creator A5066022182 @default.
- W2154164287 date "2000-01-01" @default.
- W2154164287 modified "2023-09-26" @default.
- W2154164287 title "Reliability of Tantalum Based Diffusion Barriers between Cu and Si" @default.
- W2154164287 cites W1522679221 @default.
- W2154164287 cites W1970164715 @default.
- W2154164287 cites W1979379033 @default.
- W2154164287 cites W1983406786 @default.
- W2154164287 cites W1997348162 @default.
- W2154164287 cites W2006038325 @default.
- W2154164287 cites W2026376467 @default.
- W2154164287 cites W2068386399 @default.
- W2154164287 cites W2071409193 @default.
- W2154164287 cites W2092204999 @default.
- W2154164287 cites W2140861989 @default.
- W2154164287 cites W2163829832 @default.
- W2154164287 doi "https://doi.org/10.1557/proc-612-d7.4.1" @default.
- W2154164287 hasPublicationYear "2000" @default.
- W2154164287 type Work @default.
- W2154164287 sameAs 2154164287 @default.
- W2154164287 citedByCount "4" @default.
- W2154164287 countsByYear W21541642872020 @default.
- W2154164287 countsByYear W21541642872021 @default.
- W2154164287 crossrefType "journal-article" @default.
- W2154164287 hasAuthorship W2154164287A5016476824 @default.
- W2154164287 hasAuthorship W2154164287A5023656099 @default.
- W2154164287 hasAuthorship W2154164287A5025402803 @default.
- W2154164287 hasAuthorship W2154164287A5052691144 @default.
- W2154164287 hasAuthorship W2154164287A5065435871 @default.
- W2154164287 hasAuthorship W2154164287A5066022182 @default.
- W2154164287 hasConcept C113196181 @default.
- W2154164287 hasConcept C121332964 @default.
- W2154164287 hasConcept C171250308 @default.
- W2154164287 hasConcept C178790620 @default.
- W2154164287 hasConcept C185592680 @default.
- W2154164287 hasConcept C191897082 @default.
- W2154164287 hasConcept C192562407 @default.
- W2154164287 hasConcept C199360897 @default.
- W2154164287 hasConcept C2778836790 @default.
- W2154164287 hasConcept C2779227376 @default.
- W2154164287 hasConcept C2780901251 @default.
- W2154164287 hasConcept C41008148 @default.
- W2154164287 hasConcept C43617362 @default.
- W2154164287 hasConcept C44280652 @default.
- W2154164287 hasConcept C514619126 @default.
- W2154164287 hasConcept C64452783 @default.
- W2154164287 hasConcept C69357855 @default.
- W2154164287 hasConcept C97355855 @default.
- W2154164287 hasConceptScore W2154164287C113196181 @default.
- W2154164287 hasConceptScore W2154164287C121332964 @default.
- W2154164287 hasConceptScore W2154164287C171250308 @default.
- W2154164287 hasConceptScore W2154164287C178790620 @default.
- W2154164287 hasConceptScore W2154164287C185592680 @default.
- W2154164287 hasConceptScore W2154164287C191897082 @default.
- W2154164287 hasConceptScore W2154164287C192562407 @default.
- W2154164287 hasConceptScore W2154164287C199360897 @default.
- W2154164287 hasConceptScore W2154164287C2778836790 @default.
- W2154164287 hasConceptScore W2154164287C2779227376 @default.
- W2154164287 hasConceptScore W2154164287C2780901251 @default.
- W2154164287 hasConceptScore W2154164287C41008148 @default.
- W2154164287 hasConceptScore W2154164287C43617362 @default.
- W2154164287 hasConceptScore W2154164287C44280652 @default.
- W2154164287 hasConceptScore W2154164287C514619126 @default.
- W2154164287 hasConceptScore W2154164287C64452783 @default.
- W2154164287 hasConceptScore W2154164287C69357855 @default.
- W2154164287 hasConceptScore W2154164287C97355855 @default.
- W2154164287 hasLocation W21541642871 @default.
- W2154164287 hasOpenAccess W2154164287 @default.
- W2154164287 hasPrimaryLocation W21541642871 @default.
- W2154164287 hasRelatedWork W2005324281 @default.
- W2154164287 hasRelatedWork W2005951011 @default.
- W2154164287 hasRelatedWork W2025204771 @default.
- W2154164287 hasRelatedWork W2026622689 @default.
- W2154164287 hasRelatedWork W2326492966 @default.
- W2154164287 hasRelatedWork W2360603427 @default.
- W2154164287 hasRelatedWork W2377856215 @default.
- W2154164287 hasRelatedWork W3143555417 @default.
- W2154164287 hasRelatedWork W4248309149 @default.
- W2154164287 hasRelatedWork W4296887542 @default.
- W2154164287 hasVolume "612" @default.
- W2154164287 isParatext "false" @default.
- W2154164287 isRetracted "false" @default.
- W2154164287 magId "2154164287" @default.
- W2154164287 workType "article" @default.