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- W2154328239 date "1981-01-01" @default.
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- W2154328239 title "Zersetzung von CCl4 im HF-Niederdruckplasma für plasmachemisches Ätzen von Aluminium" @default.
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- W2154328239 doi "https://doi.org/10.1002/ctpp.19810210503" @default.
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