Matches in SemOpenAlex for { <https://semopenalex.org/work/W2156551811> ?p ?o ?g. }
- W2156551811 endingPage "730" @default.
- W2156551811 startingPage "726" @default.
- W2156551811 created "2016-06-24" @default.
- W2156551811 creator A5023471541 @default.
- W2156551811 creator A5030390857 @default.
- W2156551811 creator A5039743611 @default.
- W2156551811 creator A5044756052 @default.
- W2156551811 creator A5066225553 @default.
- W2156551811 creator A5070568554 @default.
- W2156551811 creator A5088783885 @default.
- W2156551811 date "1998-03-01" @default.
- W2156551811 modified "2023-09-26" @default.
- W2156551811 title "TiN prepared by plasma source ion implantation of nitrogen into Ti as a diffusion barrier for Si/Cu metallization" @default.
- W2156551811 cites W1983406786 @default.
- W2156551811 cites W1995865275 @default.
- W2156551811 cites W2006931422 @default.
- W2156551811 cites W2034698592 @default.
- W2156551811 cites W2055397870 @default.
- W2156551811 cites W2063947867 @default.
- W2156551811 cites W2077461818 @default.
- W2156551811 cites W2082316773 @default.
- W2156551811 cites W2083605361 @default.
- W2156551811 cites W2606833972 @default.
- W2156551811 doi "https://doi.org/10.1557/jmr.1998.0091" @default.
- W2156551811 hasPublicationYear "1998" @default.
- W2156551811 type Work @default.
- W2156551811 sameAs 2156551811 @default.
- W2156551811 citedByCount "2" @default.
- W2156551811 crossrefType "journal-article" @default.
- W2156551811 hasAuthorship W2156551811A5023471541 @default.
- W2156551811 hasAuthorship W2156551811A5030390857 @default.
- W2156551811 hasAuthorship W2156551811A5039743611 @default.
- W2156551811 hasAuthorship W2156551811A5044756052 @default.
- W2156551811 hasAuthorship W2156551811A5066225553 @default.
- W2156551811 hasAuthorship W2156551811A5070568554 @default.
- W2156551811 hasAuthorship W2156551811A5088783885 @default.
- W2156551811 hasConcept C113196181 @default.
- W2156551811 hasConcept C121332964 @default.
- W2156551811 hasConcept C145148216 @default.
- W2156551811 hasConcept C171250308 @default.
- W2156551811 hasConcept C178790620 @default.
- W2156551811 hasConcept C184779094 @default.
- W2156551811 hasConcept C185544564 @default.
- W2156551811 hasConcept C185592680 @default.
- W2156551811 hasConcept C19067145 @default.
- W2156551811 hasConcept C191897082 @default.
- W2156551811 hasConcept C192562407 @default.
- W2156551811 hasConcept C25442681 @default.
- W2156551811 hasConcept C2777855556 @default.
- W2156551811 hasConcept C2778836790 @default.
- W2156551811 hasConcept C2779227376 @default.
- W2156551811 hasConcept C2780547777 @default.
- W2156551811 hasConcept C2780646311 @default.
- W2156551811 hasConcept C41823505 @default.
- W2156551811 hasConcept C43617362 @default.
- W2156551811 hasConcept C525849907 @default.
- W2156551811 hasConcept C537208039 @default.
- W2156551811 hasConcept C66825105 @default.
- W2156551811 hasConcept C69357855 @default.
- W2156551811 hasConcept C97355855 @default.
- W2156551811 hasConceptScore W2156551811C113196181 @default.
- W2156551811 hasConceptScore W2156551811C121332964 @default.
- W2156551811 hasConceptScore W2156551811C145148216 @default.
- W2156551811 hasConceptScore W2156551811C171250308 @default.
- W2156551811 hasConceptScore W2156551811C178790620 @default.
- W2156551811 hasConceptScore W2156551811C184779094 @default.
- W2156551811 hasConceptScore W2156551811C185544564 @default.
- W2156551811 hasConceptScore W2156551811C185592680 @default.
- W2156551811 hasConceptScore W2156551811C19067145 @default.
- W2156551811 hasConceptScore W2156551811C191897082 @default.
- W2156551811 hasConceptScore W2156551811C192562407 @default.
- W2156551811 hasConceptScore W2156551811C25442681 @default.
- W2156551811 hasConceptScore W2156551811C2777855556 @default.
- W2156551811 hasConceptScore W2156551811C2778836790 @default.
- W2156551811 hasConceptScore W2156551811C2779227376 @default.
- W2156551811 hasConceptScore W2156551811C2780547777 @default.
- W2156551811 hasConceptScore W2156551811C2780646311 @default.
- W2156551811 hasConceptScore W2156551811C41823505 @default.
- W2156551811 hasConceptScore W2156551811C43617362 @default.
- W2156551811 hasConceptScore W2156551811C525849907 @default.
- W2156551811 hasConceptScore W2156551811C537208039 @default.
- W2156551811 hasConceptScore W2156551811C66825105 @default.
- W2156551811 hasConceptScore W2156551811C69357855 @default.
- W2156551811 hasConceptScore W2156551811C97355855 @default.
- W2156551811 hasIssue "3" @default.
- W2156551811 hasLocation W21565518111 @default.
- W2156551811 hasOpenAccess W2156551811 @default.
- W2156551811 hasPrimaryLocation W21565518111 @default.
- W2156551811 hasRelatedWork W1599156170 @default.
- W2156551811 hasRelatedWork W1911551033 @default.
- W2156551811 hasRelatedWork W1993519491 @default.
- W2156551811 hasRelatedWork W1999569901 @default.
- W2156551811 hasRelatedWork W2013022416 @default.
- W2156551811 hasRelatedWork W2068836306 @default.
- W2156551811 hasRelatedWork W2124166613 @default.
- W2156551811 hasRelatedWork W2156551811 @default.
- W2156551811 hasRelatedWork W262113413 @default.
- W2156551811 hasRelatedWork W843023067 @default.
- W2156551811 hasVolume "13" @default.
- W2156551811 isParatext "false" @default.