Matches in SemOpenAlex for { <https://semopenalex.org/work/W2258211119> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2258211119 endingPage "112" @default.
- W2258211119 startingPage "112" @default.
- W2258211119 created "2016-06-24" @default.
- W2258211119 creator A5010297072 @default.
- W2258211119 creator A5047970188 @default.
- W2258211119 creator A5056022825 @default.
- W2258211119 date "2008-08-01" @default.
- W2258211119 modified "2023-09-23" @default.
- W2258211119 title "Effects of Sputtering power and targetsubstrate distance on the microstructures of AlN thin films fabricated by reactive RF sputtering" @default.
- W2258211119 hasPublicationYear "2008" @default.
- W2258211119 type Work @default.
- W2258211119 sameAs 2258211119 @default.
- W2258211119 citedByCount "0" @default.
- W2258211119 crossrefType "journal-article" @default.
- W2258211119 hasAuthorship W2258211119A5010297072 @default.
- W2258211119 hasAuthorship W2258211119A5047970188 @default.
- W2258211119 hasAuthorship W2258211119A5056022825 @default.
- W2258211119 hasConcept C121332964 @default.
- W2258211119 hasConcept C159985019 @default.
- W2258211119 hasConcept C163258240 @default.
- W2258211119 hasConcept C171250308 @default.
- W2258211119 hasConcept C19067145 @default.
- W2258211119 hasConcept C191897082 @default.
- W2258211119 hasConcept C192562407 @default.
- W2258211119 hasConcept C22423302 @default.
- W2258211119 hasConcept C49040817 @default.
- W2258211119 hasConcept C62520636 @default.
- W2258211119 hasConcept C87976508 @default.
- W2258211119 hasConceptScore W2258211119C121332964 @default.
- W2258211119 hasConceptScore W2258211119C159985019 @default.
- W2258211119 hasConceptScore W2258211119C163258240 @default.
- W2258211119 hasConceptScore W2258211119C171250308 @default.
- W2258211119 hasConceptScore W2258211119C19067145 @default.
- W2258211119 hasConceptScore W2258211119C191897082 @default.
- W2258211119 hasConceptScore W2258211119C192562407 @default.
- W2258211119 hasConceptScore W2258211119C22423302 @default.
- W2258211119 hasConceptScore W2258211119C49040817 @default.
- W2258211119 hasConceptScore W2258211119C62520636 @default.
- W2258211119 hasConceptScore W2258211119C87976508 @default.
- W2258211119 hasLocation W22582111191 @default.
- W2258211119 hasOpenAccess W2258211119 @default.
- W2258211119 hasPrimaryLocation W22582111191 @default.
- W2258211119 hasRelatedWork W1981694872 @default.
- W2258211119 hasRelatedWork W2302265187 @default.
- W2258211119 hasRelatedWork W2369460150 @default.
- W2258211119 hasRelatedWork W2371947365 @default.
- W2258211119 hasRelatedWork W2385367031 @default.
- W2258211119 hasRelatedWork W2393045075 @default.
- W2258211119 hasRelatedWork W2568649932 @default.
- W2258211119 hasRelatedWork W2601377302 @default.
- W2258211119 hasRelatedWork W2606977848 @default.
- W2258211119 hasRelatedWork W2735143583 @default.
- W2258211119 hasRelatedWork W2805919081 @default.
- W2258211119 hasRelatedWork W2967648096 @default.
- W2258211119 hasRelatedWork W2991380784 @default.
- W2258211119 hasRelatedWork W3089165554 @default.
- W2258211119 hasRelatedWork W3135194095 @default.
- W2258211119 hasRelatedWork W3181387569 @default.
- W2258211119 hasRelatedWork W3191000616 @default.
- W2258211119 hasRelatedWork W865021113 @default.
- W2258211119 hasRelatedWork W930380070 @default.
- W2258211119 hasRelatedWork W3119324438 @default.
- W2258211119 isParatext "false" @default.
- W2258211119 isRetracted "false" @default.
- W2258211119 magId "2258211119" @default.
- W2258211119 workType "article" @default.