Matches in SemOpenAlex for { <https://semopenalex.org/work/W2261633229> ?p ?o ?g. }
- W2261633229 created "2016-06-24" @default.
- W2261633229 creator A5008881400 @default.
- W2261633229 creator A5041881381 @default.
- W2261633229 creator A5049447564 @default.
- W2261633229 creator A5052280806 @default.
- W2261633229 creator A5059141420 @default.
- W2261633229 creator A5064485027 @default.
- W2261633229 creator A5066833850 @default.
- W2261633229 creator A5070070086 @default.
- W2261633229 date "2002-01-01" @default.
- W2261633229 modified "2023-09-27" @default.
- W2261633229 title "Metrology Study of Sub 20Å Oxynitride by Corona-Oxide-Silicon (COS) and Conventional C-V Approaches" @default.
- W2261633229 cites W1977190716 @default.
- W2261633229 cites W2056230013 @default.
- W2261633229 cites W2072084460 @default.
- W2261633229 cites W2086126257 @default.
- W2261633229 doi "https://doi.org/10.1557/proc-716-b2.12" @default.
- W2261633229 hasPublicationYear "2002" @default.
- W2261633229 type Work @default.
- W2261633229 sameAs 2261633229 @default.
- W2261633229 citedByCount "1" @default.
- W2261633229 countsByYear W22616332292013 @default.
- W2261633229 crossrefType "journal-article" @default.
- W2261633229 hasAuthorship W2261633229A5008881400 @default.
- W2261633229 hasAuthorship W2261633229A5041881381 @default.
- W2261633229 hasAuthorship W2261633229A5049447564 @default.
- W2261633229 hasAuthorship W2261633229A5052280806 @default.
- W2261633229 hasAuthorship W2261633229A5059141420 @default.
- W2261633229 hasAuthorship W2261633229A5064485027 @default.
- W2261633229 hasAuthorship W2261633229A5066833850 @default.
- W2261633229 hasAuthorship W2261633229A5070070086 @default.
- W2261633229 hasConcept C113196181 @default.
- W2261633229 hasConcept C119599485 @default.
- W2261633229 hasConcept C121332964 @default.
- W2261633229 hasConcept C127413603 @default.
- W2261633229 hasConcept C133386390 @default.
- W2261633229 hasConcept C159985019 @default.
- W2261633229 hasConcept C165801399 @default.
- W2261633229 hasConcept C171250308 @default.
- W2261633229 hasConcept C172385210 @default.
- W2261633229 hasConcept C185592680 @default.
- W2261633229 hasConcept C191897082 @default.
- W2261633229 hasConcept C192562407 @default.
- W2261633229 hasConcept C2361726 @default.
- W2261633229 hasConcept C2777431650 @default.
- W2261633229 hasConcept C2777855556 @default.
- W2261633229 hasConcept C2779227376 @default.
- W2261633229 hasConcept C2779476251 @default.
- W2261633229 hasConcept C2779851234 @default.
- W2261633229 hasConcept C33574316 @default.
- W2261633229 hasConcept C43617362 @default.
- W2261633229 hasConcept C49040817 @default.
- W2261633229 hasConcept C52780932 @default.
- W2261633229 hasConcept C537208039 @default.
- W2261633229 hasConcept C544956773 @default.
- W2261633229 hasConcept C62520636 @default.
- W2261633229 hasConceptScore W2261633229C113196181 @default.
- W2261633229 hasConceptScore W2261633229C119599485 @default.
- W2261633229 hasConceptScore W2261633229C121332964 @default.
- W2261633229 hasConceptScore W2261633229C127413603 @default.
- W2261633229 hasConceptScore W2261633229C133386390 @default.
- W2261633229 hasConceptScore W2261633229C159985019 @default.
- W2261633229 hasConceptScore W2261633229C165801399 @default.
- W2261633229 hasConceptScore W2261633229C171250308 @default.
- W2261633229 hasConceptScore W2261633229C172385210 @default.
- W2261633229 hasConceptScore W2261633229C185592680 @default.
- W2261633229 hasConceptScore W2261633229C191897082 @default.
- W2261633229 hasConceptScore W2261633229C192562407 @default.
- W2261633229 hasConceptScore W2261633229C2361726 @default.
- W2261633229 hasConceptScore W2261633229C2777431650 @default.
- W2261633229 hasConceptScore W2261633229C2777855556 @default.
- W2261633229 hasConceptScore W2261633229C2779227376 @default.
- W2261633229 hasConceptScore W2261633229C2779476251 @default.
- W2261633229 hasConceptScore W2261633229C2779851234 @default.
- W2261633229 hasConceptScore W2261633229C33574316 @default.
- W2261633229 hasConceptScore W2261633229C43617362 @default.
- W2261633229 hasConceptScore W2261633229C49040817 @default.
- W2261633229 hasConceptScore W2261633229C52780932 @default.
- W2261633229 hasConceptScore W2261633229C537208039 @default.
- W2261633229 hasConceptScore W2261633229C544956773 @default.
- W2261633229 hasConceptScore W2261633229C62520636 @default.
- W2261633229 hasLocation W22616332291 @default.
- W2261633229 hasOpenAccess W2261633229 @default.
- W2261633229 hasPrimaryLocation W22616332291 @default.
- W2261633229 hasRelatedWork W1569209320 @default.
- W2261633229 hasRelatedWork W1975778693 @default.
- W2261633229 hasRelatedWork W1986119286 @default.
- W2261633229 hasRelatedWork W1996168331 @default.
- W2261633229 hasRelatedWork W2018312687 @default.
- W2261633229 hasRelatedWork W2029360452 @default.
- W2261633229 hasRelatedWork W2032257326 @default.
- W2261633229 hasRelatedWork W2062250356 @default.
- W2261633229 hasRelatedWork W2075339278 @default.
- W2261633229 hasRelatedWork W2090811677 @default.
- W2261633229 hasRelatedWork W2114561660 @default.
- W2261633229 hasRelatedWork W2145054884 @default.
- W2261633229 hasRelatedWork W216553410 @default.
- W2261633229 hasRelatedWork W2347163626 @default.
- W2261633229 hasRelatedWork W2519960277 @default.
- W2261633229 hasRelatedWork W2922149920 @default.