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- W2275332604 created "2016-06-24" @default.
- W2275332604 creator A5050492222 @default.
- W2275332604 creator A5057903968 @default.
- W2275332604 creator A5065421960 @default.
- W2275332604 creator A5071426093 @default.
- W2275332604 creator A5085486310 @default.
- W2275332604 date "2005-01-01" @default.
- W2275332604 modified "2023-09-27" @default.
- W2275332604 title "CVD Boron Carbo-Nitride as Pore Sealant for Ultra Low-K Interlayer Dielectrics" @default.
- W2275332604 cites W2009221461 @default.
- W2275332604 cites W2047404361 @default.
- W2275332604 cites W2065217462 @default.
- W2275332604 cites W2080730325 @default.
- W2275332604 cites W2088147148 @default.
- W2275332604 doi "https://doi.org/10.1557/proc-863-b6.8" @default.
- W2275332604 hasPublicationYear "2005" @default.
- W2275332604 type Work @default.
- W2275332604 sameAs 2275332604 @default.
- W2275332604 citedByCount "0" @default.
- W2275332604 crossrefType "journal-article" @default.
- W2275332604 hasAuthorship W2275332604A5050492222 @default.
- W2275332604 hasAuthorship W2275332604A5057903968 @default.
- W2275332604 hasAuthorship W2275332604A5065421960 @default.
- W2275332604 hasAuthorship W2275332604A5071426093 @default.
- W2275332604 hasAuthorship W2275332604A5085486310 @default.
- W2275332604 hasConcept C113196181 @default.
- W2275332604 hasConcept C127413603 @default.
- W2275332604 hasConcept C162356407 @default.
- W2275332604 hasConcept C171250308 @default.
- W2275332604 hasConcept C175708663 @default.
- W2275332604 hasConcept C185592680 @default.
- W2275332604 hasConcept C19067145 @default.
- W2275332604 hasConcept C192562407 @default.
- W2275332604 hasConcept C22423302 @default.
- W2275332604 hasConcept C42360764 @default.
- W2275332604 hasConcept C42475967 @default.
- W2275332604 hasConcept C43617362 @default.
- W2275332604 hasConcept C77671233 @default.
- W2275332604 hasConcept C80107235 @default.
- W2275332604 hasConceptScore W2275332604C113196181 @default.
- W2275332604 hasConceptScore W2275332604C127413603 @default.
- W2275332604 hasConceptScore W2275332604C162356407 @default.
- W2275332604 hasConceptScore W2275332604C171250308 @default.
- W2275332604 hasConceptScore W2275332604C175708663 @default.
- W2275332604 hasConceptScore W2275332604C185592680 @default.
- W2275332604 hasConceptScore W2275332604C19067145 @default.
- W2275332604 hasConceptScore W2275332604C192562407 @default.
- W2275332604 hasConceptScore W2275332604C22423302 @default.
- W2275332604 hasConceptScore W2275332604C42360764 @default.
- W2275332604 hasConceptScore W2275332604C42475967 @default.
- W2275332604 hasConceptScore W2275332604C43617362 @default.
- W2275332604 hasConceptScore W2275332604C77671233 @default.
- W2275332604 hasConceptScore W2275332604C80107235 @default.
- W2275332604 hasLocation W22753326041 @default.
- W2275332604 hasOpenAccess W2275332604 @default.
- W2275332604 hasPrimaryLocation W22753326041 @default.
- W2275332604 hasRelatedWork W1975096616 @default.
- W2275332604 hasRelatedWork W1982573420 @default.
- W2275332604 hasRelatedWork W1988392892 @default.
- W2275332604 hasRelatedWork W2014274232 @default.
- W2275332604 hasRelatedWork W2038363336 @default.
- W2275332604 hasRelatedWork W2041748642 @default.
- W2275332604 hasRelatedWork W2050744320 @default.
- W2275332604 hasRelatedWork W2070536146 @default.
- W2275332604 hasRelatedWork W2111662145 @default.
- W2275332604 hasRelatedWork W2524859769 @default.
- W2275332604 isParatext "false" @default.
- W2275332604 isRetracted "false" @default.
- W2275332604 magId "2275332604" @default.
- W2275332604 workType "article" @default.