Matches in SemOpenAlex for { <https://semopenalex.org/work/W2275982885> ?p ?o ?g. }
Showing items 1 to 71 of
71
with 100 items per page.
- W2275982885 startingPage "390" @default.
- W2275982885 created "2016-06-24" @default.
- W2275982885 creator A5037962438 @default.
- W2275982885 creator A5067006158 @default.
- W2275982885 creator A5074811473 @default.
- W2275982885 creator A5078749783 @default.
- W2275982885 date "2001-03-20" @default.
- W2275982885 modified "2023-09-28" @default.
- W2275982885 title "Relationship between Internal Stress and Surface Roughness for Titanium Nitride Films Deposited by HCD-IP" @default.
- W2275982885 hasPublicationYear "2001" @default.
- W2275982885 type Work @default.
- W2275982885 sameAs 2275982885 @default.
- W2275982885 citedByCount "0" @default.
- W2275982885 crossrefType "journal-article" @default.
- W2275982885 hasAuthorship W2275982885A5037962438 @default.
- W2275982885 hasAuthorship W2275982885A5067006158 @default.
- W2275982885 hasAuthorship W2275982885A5074811473 @default.
- W2275982885 hasAuthorship W2275982885A5078749783 @default.
- W2275982885 hasConcept C107365816 @default.
- W2275982885 hasConcept C138885662 @default.
- W2275982885 hasConcept C159985019 @default.
- W2275982885 hasConcept C191897082 @default.
- W2275982885 hasConcept C192562407 @default.
- W2275982885 hasConcept C194760766 @default.
- W2275982885 hasConcept C21036866 @default.
- W2275982885 hasConcept C2778489163 @default.
- W2275982885 hasConcept C2779227376 @default.
- W2275982885 hasConcept C2988361403 @default.
- W2275982885 hasConcept C41895202 @default.
- W2275982885 hasConcept C71039073 @default.
- W2275982885 hasConceptScore W2275982885C107365816 @default.
- W2275982885 hasConceptScore W2275982885C138885662 @default.
- W2275982885 hasConceptScore W2275982885C159985019 @default.
- W2275982885 hasConceptScore W2275982885C191897082 @default.
- W2275982885 hasConceptScore W2275982885C192562407 @default.
- W2275982885 hasConceptScore W2275982885C194760766 @default.
- W2275982885 hasConceptScore W2275982885C21036866 @default.
- W2275982885 hasConceptScore W2275982885C2778489163 @default.
- W2275982885 hasConceptScore W2275982885C2779227376 @default.
- W2275982885 hasConceptScore W2275982885C2988361403 @default.
- W2275982885 hasConceptScore W2275982885C41895202 @default.
- W2275982885 hasConceptScore W2275982885C71039073 @default.
- W2275982885 hasIssue "3" @default.
- W2275982885 hasLocation W22759828851 @default.
- W2275982885 hasOpenAccess W2275982885 @default.
- W2275982885 hasPrimaryLocation W22759828851 @default.
- W2275982885 hasRelatedWork W1965820964 @default.
- W2275982885 hasRelatedWork W1971156639 @default.
- W2275982885 hasRelatedWork W2000789235 @default.
- W2275982885 hasRelatedWork W2044500946 @default.
- W2275982885 hasRelatedWork W2073504051 @default.
- W2275982885 hasRelatedWork W2074669757 @default.
- W2275982885 hasRelatedWork W2084754663 @default.
- W2275982885 hasRelatedWork W2138624009 @default.
- W2275982885 hasRelatedWork W2143587216 @default.
- W2275982885 hasRelatedWork W2372973403 @default.
- W2275982885 hasRelatedWork W2380877174 @default.
- W2275982885 hasRelatedWork W2464376387 @default.
- W2275982885 hasRelatedWork W2605417825 @default.
- W2275982885 hasRelatedWork W2615685721 @default.
- W2275982885 hasRelatedWork W2831364035 @default.
- W2275982885 hasRelatedWork W2912626327 @default.
- W2275982885 hasRelatedWork W2924007521 @default.
- W2275982885 hasRelatedWork W2943233939 @default.
- W2275982885 hasRelatedWork W3163342557 @default.
- W2275982885 hasRelatedWork W2737936687 @default.
- W2275982885 hasVolume "44" @default.
- W2275982885 isParatext "false" @default.
- W2275982885 isRetracted "false" @default.
- W2275982885 magId "2275982885" @default.
- W2275982885 workType "article" @default.