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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2283348063> ?p ?o ?g. }

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• W2283348063 date "2016-02-23" @default.
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• W2283348063 title "Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma" @default.
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