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- W2284812858 endingPage "67" @default.
- W2284812858 startingPage "63" @default.
- W2284812858 created "2016-06-24" @default.
- W2284812858 creator A5007538494 @default.
- W2284812858 creator A5043022589 @default.
- W2284812858 creator A5048869661 @default.
- W2284812858 date "1994-08-01" @default.
- W2284812858 modified "2023-10-16" @default.
- W2284812858 title "Planarized Copper Multilevel Interconnections for ULSI Applications" @default.
- W2284812858 cites W2083090974 @default.
- W2284812858 doi "https://doi.org/10.1557/s088376940004776x" @default.
- W2284812858 hasPublicationYear "1994" @default.
- W2284812858 type Work @default.
- W2284812858 sameAs 2284812858 @default.
- W2284812858 citedByCount "18" @default.
- W2284812858 countsByYear W22848128582016 @default.
- W2284812858 countsByYear W22848128582017 @default.
- W2284812858 countsByYear W22848128582020 @default.
- W2284812858 crossrefType "journal-article" @default.
- W2284812858 hasAuthorship W2284812858A5007538494 @default.
- W2284812858 hasAuthorship W2284812858A5043022589 @default.
- W2284812858 hasAuthorship W2284812858A5048869661 @default.
- W2284812858 hasConcept C100460472 @default.
- W2284812858 hasConcept C116372231 @default.
- W2284812858 hasConcept C119599485 @default.
- W2284812858 hasConcept C121332964 @default.
- W2284812858 hasConcept C123745756 @default.
- W2284812858 hasConcept C127413603 @default.
- W2284812858 hasConcept C133386390 @default.
- W2284812858 hasConcept C134146338 @default.
- W2284812858 hasConcept C138055206 @default.
- W2284812858 hasConcept C159985019 @default.
- W2284812858 hasConcept C163258240 @default.
- W2284812858 hasConcept C165801399 @default.
- W2284812858 hasConcept C171250308 @default.
- W2284812858 hasConcept C172385210 @default.
- W2284812858 hasConcept C187937830 @default.
- W2284812858 hasConcept C192562407 @default.
- W2284812858 hasConcept C2779227376 @default.
- W2284812858 hasConcept C31258907 @default.
- W2284812858 hasConcept C41008148 @default.
- W2284812858 hasConcept C43214815 @default.
- W2284812858 hasConcept C49040817 @default.
- W2284812858 hasConcept C513153333 @default.
- W2284812858 hasConcept C530198007 @default.
- W2284812858 hasConcept C62520636 @default.
- W2284812858 hasConceptScore W2284812858C100460472 @default.
- W2284812858 hasConceptScore W2284812858C116372231 @default.
- W2284812858 hasConceptScore W2284812858C119599485 @default.
- W2284812858 hasConceptScore W2284812858C121332964 @default.
- W2284812858 hasConceptScore W2284812858C123745756 @default.
- W2284812858 hasConceptScore W2284812858C127413603 @default.
- W2284812858 hasConceptScore W2284812858C133386390 @default.
- W2284812858 hasConceptScore W2284812858C134146338 @default.
- W2284812858 hasConceptScore W2284812858C138055206 @default.
- W2284812858 hasConceptScore W2284812858C159985019 @default.
- W2284812858 hasConceptScore W2284812858C163258240 @default.
- W2284812858 hasConceptScore W2284812858C165801399 @default.
- W2284812858 hasConceptScore W2284812858C171250308 @default.
- W2284812858 hasConceptScore W2284812858C172385210 @default.
- W2284812858 hasConceptScore W2284812858C187937830 @default.
- W2284812858 hasConceptScore W2284812858C192562407 @default.
- W2284812858 hasConceptScore W2284812858C2779227376 @default.
- W2284812858 hasConceptScore W2284812858C31258907 @default.
- W2284812858 hasConceptScore W2284812858C41008148 @default.
- W2284812858 hasConceptScore W2284812858C43214815 @default.
- W2284812858 hasConceptScore W2284812858C49040817 @default.
- W2284812858 hasConceptScore W2284812858C513153333 @default.
- W2284812858 hasConceptScore W2284812858C530198007 @default.
- W2284812858 hasConceptScore W2284812858C62520636 @default.
- W2284812858 hasIssue "8" @default.
- W2284812858 hasLocation W22848128581 @default.
- W2284812858 hasOpenAccess W2284812858 @default.
- W2284812858 hasPrimaryLocation W22848128581 @default.
- W2284812858 hasRelatedWork W1989695743 @default.
- W2284812858 hasRelatedWork W2011617384 @default.
- W2284812858 hasRelatedWork W2020812919 @default.
- W2284812858 hasRelatedWork W2135610295 @default.
- W2284812858 hasRelatedWork W2160638646 @default.
- W2284812858 hasRelatedWork W2189079683 @default.
- W2284812858 hasRelatedWork W2393079529 @default.
- W2284812858 hasRelatedWork W2548314560 @default.
- W2284812858 hasRelatedWork W3176277023 @default.
- W2284812858 hasRelatedWork W94280762 @default.
- W2284812858 hasVolume "19" @default.
- W2284812858 isParatext "false" @default.
- W2284812858 isRetracted "false" @default.
- W2284812858 magId "2284812858" @default.
- W2284812858 workType "article" @default.