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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2317104940> ?p ?o ?g. }

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• W2317104940 date "1986-01-01" @default.
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• W2317104940 title "The Characterization of Silicon Damaged by Low Energy Argon Ion Etching" @default.
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• W2317104940 doi "https://doi.org/10.1557/proc-76-171" @default.
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