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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2324263521> ?p ?o ?g. }

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• W2324263521 date "1993-01-01" @default.
• W2324263521 modified "2023-10-16" @default.
• W2324263521 title "Control of Si-SiO₂ Interface Properties in MOS Devices Prepared by Plasma-Assisted and Rapid Thermal Processes" @default.
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• W2324263521 doi "https://doi.org/10.1557/proc-318-81" @default.
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