Matches in SemOpenAlex for { <https://semopenalex.org/work/W2327222575> ?p ?o ?g. }
- W2327222575 endingPage "48" @default.
- W2327222575 startingPage "41" @default.
- W2327222575 created "2016-06-24" @default.
- W2327222575 creator A5061612904 @default.
- W2327222575 creator A5067904131 @default.
- W2327222575 date "1994-08-01" @default.
- W2327222575 modified "2023-10-14" @default.
- W2327222575 title "Chemical Vapor Deposition of Copper for IC Metallization: Precursor Chemistry and Molecular Structure" @default.
- W2327222575 cites W1557464911 @default.
- W2327222575 cites W1564098596 @default.
- W2327222575 cites W1598672916 @default.
- W2327222575 cites W1972927506 @default.
- W2327222575 cites W1973312285 @default.
- W2327222575 cites W1975664846 @default.
- W2327222575 cites W1976990865 @default.
- W2327222575 cites W1980036288 @default.
- W2327222575 cites W1984053181 @default.
- W2327222575 cites W1988027773 @default.
- W2327222575 cites W1992031843 @default.
- W2327222575 cites W1996551465 @default.
- W2327222575 cites W1997133393 @default.
- W2327222575 cites W1997199533 @default.
- W2327222575 cites W2003299011 @default.
- W2327222575 cites W2006948587 @default.
- W2327222575 cites W2007804032 @default.
- W2327222575 cites W2008135872 @default.
- W2327222575 cites W2010093495 @default.
- W2327222575 cites W2011310358 @default.
- W2327222575 cites W2012063873 @default.
- W2327222575 cites W2013268909 @default.
- W2327222575 cites W2015018128 @default.
- W2327222575 cites W2019145170 @default.
- W2327222575 cites W2021015832 @default.
- W2327222575 cites W2022306153 @default.
- W2327222575 cites W2026932574 @default.
- W2327222575 cites W2029176235 @default.
- W2327222575 cites W2033044168 @default.
- W2327222575 cites W2034348430 @default.
- W2327222575 cites W2037684105 @default.
- W2327222575 cites W2041043646 @default.
- W2327222575 cites W2042507221 @default.
- W2327222575 cites W2044432963 @default.
- W2327222575 cites W2051040701 @default.
- W2327222575 cites W2058622659 @default.
- W2327222575 cites W2061521687 @default.
- W2327222575 cites W2065743634 @default.
- W2327222575 cites W2066301944 @default.
- W2327222575 cites W2068384658 @default.
- W2327222575 cites W2068937151 @default.
- W2327222575 cites W2073482310 @default.
- W2327222575 cites W2073784579 @default.
- W2327222575 cites W2075194566 @default.
- W2327222575 cites W2075516764 @default.
- W2327222575 cites W2076150383 @default.
- W2327222575 cites W2077244276 @default.
- W2327222575 cites W2077461818 @default.
- W2327222575 cites W2083605361 @default.
- W2327222575 cites W2086377074 @default.
- W2327222575 cites W2089315264 @default.
- W2327222575 cites W2091341127 @default.
- W2327222575 cites W2093194503 @default.
- W2327222575 cites W2153978270 @default.
- W2327222575 cites W2158859305 @default.
- W2327222575 cites W2160526071 @default.
- W2327222575 cites W2167914207 @default.
- W2327222575 cites W246474656 @default.
- W2327222575 cites W2605576974 @default.
- W2327222575 cites W2949604916 @default.
- W2327222575 cites W3022479170 @default.
- W2327222575 cites W3158452420 @default.
- W2327222575 doi "https://doi.org/10.1557/s0883769400047722" @default.
- W2327222575 hasPublicationYear "1994" @default.
- W2327222575 type Work @default.
- W2327222575 sameAs 2327222575 @default.
- W2327222575 citedByCount "62" @default.
- W2327222575 countsByYear W23272225752016 @default.
- W2327222575 countsByYear W23272225752019 @default.
- W2327222575 countsByYear W23272225752021 @default.
- W2327222575 crossrefType "journal-article" @default.
- W2327222575 hasAuthorship W2327222575A5061612904 @default.
- W2327222575 hasAuthorship W2327222575A5067904131 @default.
- W2327222575 hasConcept C119599485 @default.
- W2327222575 hasConcept C127413603 @default.
- W2327222575 hasConcept C136525101 @default.
- W2327222575 hasConcept C142724271 @default.
- W2327222575 hasConcept C151730666 @default.
- W2327222575 hasConcept C171250308 @default.
- W2327222575 hasConcept C187937830 @default.
- W2327222575 hasConcept C191897082 @default.
- W2327222575 hasConcept C192562407 @default.
- W2327222575 hasConcept C204787440 @default.
- W2327222575 hasConcept C2780026712 @default.
- W2327222575 hasConcept C2816523 @default.
- W2327222575 hasConcept C49040817 @default.
- W2327222575 hasConcept C530198007 @default.
- W2327222575 hasConcept C544778455 @default.
- W2327222575 hasConcept C57410435 @default.
- W2327222575 hasConcept C61696701 @default.
- W2327222575 hasConcept C64297162 @default.
- W2327222575 hasConcept C69990965 @default.