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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2330752017> ?p ?o ?g. }

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• W2330752017 date "1997-01-01" @default.
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• W2330752017 title "Deposition Sequences for Atomic Layer Growth of AlN Thin Films on Si(100) Using Dimethylethylamine Alane and Ammonia" @default.
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• W2330752017 doi "https://doi.org/10.1557/proc-482-33" @default.
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