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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2331284457> ?p ?o ?g. }

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• W2331284457 date "1993-02-01" @default.
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• W2331284457 title "Preparation and characterization of thin films of MgO, Al2O3 and MgAl2O4 by atomic layer deposition" @default.
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• W2331284457 doi "https://doi.org/10.1007/bf02665029" @default.
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