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- W2331797129 endingPage "1339" @default.
- W2331797129 startingPage "1336" @default.
- W2331797129 created "2016-06-24" @default.
- W2331797129 creator A5058462484 @default.
- W2331797129 date "1985-01-01" @default.
- W2331797129 modified "2023-10-04" @default.
- W2331797129 title "Special issue on semiconductors - Materials and processing technologies. Clean wafer transportation system - Linear motor drive system." @default.
- W2331797129 doi "https://doi.org/10.2493/jjspe1933.51.1336" @default.
- W2331797129 hasPublicationYear "1985" @default.
- W2331797129 type Work @default.
- W2331797129 sameAs 2331797129 @default.
- W2331797129 citedByCount "0" @default.
- W2331797129 crossrefType "journal-article" @default.
- W2331797129 hasAuthorship W2331797129A5058462484 @default.
- W2331797129 hasBestOaLocation W23317971291 @default.
- W2331797129 hasConcept C108225325 @default.
- W2331797129 hasConcept C119599485 @default.
- W2331797129 hasConcept C127413603 @default.
- W2331797129 hasConcept C154750914 @default.
- W2331797129 hasConcept C160671074 @default.
- W2331797129 hasConcept C165801399 @default.
- W2331797129 hasConcept C165948005 @default.
- W2331797129 hasConcept C171146098 @default.
- W2331797129 hasConcept C192562407 @default.
- W2331797129 hasConcept C46150780 @default.
- W2331797129 hasConcept C78519656 @default.
- W2331797129 hasConcept C80962145 @default.
- W2331797129 hasConceptScore W2331797129C108225325 @default.
- W2331797129 hasConceptScore W2331797129C119599485 @default.
- W2331797129 hasConceptScore W2331797129C127413603 @default.
- W2331797129 hasConceptScore W2331797129C154750914 @default.
- W2331797129 hasConceptScore W2331797129C160671074 @default.
- W2331797129 hasConceptScore W2331797129C165801399 @default.
- W2331797129 hasConceptScore W2331797129C165948005 @default.
- W2331797129 hasConceptScore W2331797129C171146098 @default.
- W2331797129 hasConceptScore W2331797129C192562407 @default.
- W2331797129 hasConceptScore W2331797129C46150780 @default.
- W2331797129 hasConceptScore W2331797129C78519656 @default.
- W2331797129 hasConceptScore W2331797129C80962145 @default.
- W2331797129 hasIssue "7" @default.
- W2331797129 hasLocation W23317971291 @default.
- W2331797129 hasOpenAccess W2331797129 @default.
- W2331797129 hasPrimaryLocation W23317971291 @default.
- W2331797129 hasRelatedWork W1493135999 @default.
- W2331797129 hasRelatedWork W1576727035 @default.
- W2331797129 hasRelatedWork W1865038885 @default.
- W2331797129 hasRelatedWork W1926881981 @default.
- W2331797129 hasRelatedWork W1980924011 @default.
- W2331797129 hasRelatedWork W2020256671 @default.
- W2331797129 hasRelatedWork W2102669286 @default.
- W2331797129 hasRelatedWork W2105663963 @default.
- W2331797129 hasRelatedWork W2125194106 @default.
- W2331797129 hasRelatedWork W2133085455 @default.
- W2331797129 hasRelatedWork W2154412061 @default.
- W2331797129 hasRelatedWork W2158486846 @default.
- W2331797129 hasRelatedWork W2307758300 @default.
- W2331797129 hasRelatedWork W2312492348 @default.
- W2331797129 hasRelatedWork W2334749425 @default.
- W2331797129 hasRelatedWork W2542298367 @default.
- W2331797129 hasRelatedWork W2612335664 @default.
- W2331797129 hasRelatedWork W2616804298 @default.
- W2331797129 hasRelatedWork W2187636470 @default.
- W2331797129 hasRelatedWork W3054215143 @default.
- W2331797129 hasVolume "51" @default.
- W2331797129 isParatext "false" @default.
- W2331797129 isRetracted "false" @default.
- W2331797129 magId "2331797129" @default.
- W2331797129 workType "article" @default.