Matches in SemOpenAlex for { <https://semopenalex.org/work/W2332370827> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2332370827 created "2016-06-24" @default.
- W2332370827 creator A5001530223 @default.
- W2332370827 creator A5012883773 @default.
- W2332370827 creator A5028875154 @default.
- W2332370827 creator A5041673168 @default.
- W2332370827 creator A5084119891 @default.
- W2332370827 date "2014-10-01" @default.
- W2332370827 modified "2023-09-23" @default.
- W2332370827 title "Precise etching of AlGaN/GaN HEMT structures with Cl<inf>2</inf>/BCL<inf>3</inf>/Ar plasma" @default.
- W2332370827 cites W2052018292 @default.
- W2332370827 cites W2058382361 @default.
- W2332370827 cites W2087742711 @default.
- W2332370827 cites W2104382807 @default.
- W2332370827 cites W2141981815 @default.
- W2332370827 doi "https://doi.org/10.1109/asdam.2014.6998649" @default.
- W2332370827 hasPublicationYear "2014" @default.
- W2332370827 type Work @default.
- W2332370827 sameAs 2332370827 @default.
- W2332370827 citedByCount "0" @default.
- W2332370827 crossrefType "proceedings-article" @default.
- W2332370827 hasAuthorship W2332370827A5001530223 @default.
- W2332370827 hasAuthorship W2332370827A5012883773 @default.
- W2332370827 hasAuthorship W2332370827A5028875154 @default.
- W2332370827 hasAuthorship W2332370827A5041673168 @default.
- W2332370827 hasAuthorship W2332370827A5084119891 @default.
- W2332370827 hasConcept C100460472 @default.
- W2332370827 hasConcept C107187091 @default.
- W2332370827 hasConcept C119599485 @default.
- W2332370827 hasConcept C121332964 @default.
- W2332370827 hasConcept C127413603 @default.
- W2332370827 hasConcept C162057924 @default.
- W2332370827 hasConcept C165801399 @default.
- W2332370827 hasConcept C171250308 @default.
- W2332370827 hasConcept C172385210 @default.
- W2332370827 hasConcept C189278905 @default.
- W2332370827 hasConcept C192562407 @default.
- W2332370827 hasConcept C2778871202 @default.
- W2332370827 hasConcept C2779227376 @default.
- W2332370827 hasConcept C49040817 @default.
- W2332370827 hasConcept C62520636 @default.
- W2332370827 hasConcept C82706917 @default.
- W2332370827 hasConceptScore W2332370827C100460472 @default.
- W2332370827 hasConceptScore W2332370827C107187091 @default.
- W2332370827 hasConceptScore W2332370827C119599485 @default.
- W2332370827 hasConceptScore W2332370827C121332964 @default.
- W2332370827 hasConceptScore W2332370827C127413603 @default.
- W2332370827 hasConceptScore W2332370827C162057924 @default.
- W2332370827 hasConceptScore W2332370827C165801399 @default.
- W2332370827 hasConceptScore W2332370827C171250308 @default.
- W2332370827 hasConceptScore W2332370827C172385210 @default.
- W2332370827 hasConceptScore W2332370827C189278905 @default.
- W2332370827 hasConceptScore W2332370827C192562407 @default.
- W2332370827 hasConceptScore W2332370827C2778871202 @default.
- W2332370827 hasConceptScore W2332370827C2779227376 @default.
- W2332370827 hasConceptScore W2332370827C49040817 @default.
- W2332370827 hasConceptScore W2332370827C62520636 @default.
- W2332370827 hasConceptScore W2332370827C82706917 @default.
- W2332370827 hasLocation W23323708271 @default.
- W2332370827 hasOpenAccess W2332370827 @default.
- W2332370827 hasPrimaryLocation W23323708271 @default.
- W2332370827 hasRelatedWork W1484711989 @default.
- W2332370827 hasRelatedWork W1520046859 @default.
- W2332370827 hasRelatedWork W1526188237 @default.
- W2332370827 hasRelatedWork W1552591868 @default.
- W2332370827 hasRelatedWork W1966273024 @default.
- W2332370827 hasRelatedWork W1970417881 @default.
- W2332370827 hasRelatedWork W2060996368 @default.
- W2332370827 hasRelatedWork W2070483045 @default.
- W2332370827 hasRelatedWork W2077393444 @default.
- W2332370827 hasRelatedWork W2082758816 @default.
- W2332370827 hasRelatedWork W2136226468 @default.
- W2332370827 hasRelatedWork W2751944108 @default.
- W2332370827 hasRelatedWork W2898475205 @default.
- W2332370827 hasRelatedWork W2971723557 @default.
- W2332370827 hasRelatedWork W2985870615 @default.
- W2332370827 hasRelatedWork W2993709284 @default.
- W2332370827 hasRelatedWork W3006411643 @default.
- W2332370827 hasRelatedWork W3123466498 @default.
- W2332370827 hasRelatedWork W3145967516 @default.
- W2332370827 hasRelatedWork W3195646657 @default.
- W2332370827 isParatext "false" @default.
- W2332370827 isRetracted "false" @default.
- W2332370827 magId "2332370827" @default.
- W2332370827 workType "article" @default.