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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2344478882> ?p ?o ?g. }

• W2344478882 endingPage "18" @default.
• W2344478882 startingPage "13" @default.
• W2344478882 created "2016-06-24" @default.
• W2344478882 creator A5001489530 @default.
• W2344478882 creator A5017855642 @default.
• W2344478882 creator A5019913396 @default.
• W2344478882 creator A5027108498 @default.
• W2344478882 creator A5048748647 @default.
• W2344478882 creator A5062661793 @default.
• W2344478882 creator A5062715209 @default.
• W2344478882 creator A5078601872 @default.
• W2344478882 date "2002-06-13" @default.
• W2344478882 modified "2023-09-27" @default.
• W2344478882 title "Improving Reliability of Ultra Thin Silicon Nitride Gate Dielectric Film Directly Grown at Low Temperature by Microwave-Excited High-Density Plasma" @default.
• W2344478882 hasPublicationYear "2002" @default.
• W2344478882 type Work @default.
• W2344478882 sameAs 2344478882 @default.
• W2344478882 citedByCount "0" @default.
• W2344478882 crossrefType "journal-article" @default.
• W2344478882 hasAuthorship W2344478882A5001489530 @default.
• W2344478882 hasAuthorship W2344478882A5017855642 @default.
• W2344478882 hasAuthorship W2344478882A5019913396 @default.
• W2344478882 hasAuthorship W2344478882A5027108498 @default.
• W2344478882 hasAuthorship W2344478882A5048748647 @default.
• W2344478882 hasAuthorship W2344478882A5062661793 @default.
• W2344478882 hasAuthorship W2344478882A5062715209 @default.
• W2344478882 hasAuthorship W2344478882A5078601872 @default.
• W2344478882 hasConcept C119599485 @default.
• W2344478882 hasConcept C121332964 @default.
• W2344478882 hasConcept C127413603 @default.
• W2344478882 hasConcept C133386390 @default.
• W2344478882 hasConcept C163258240 @default.
• W2344478882 hasConcept C165801399 @default.
• W2344478882 hasConcept C166972891 @default.
• W2344478882 hasConcept C171250308 @default.
• W2344478882 hasConcept C172385210 @default.
• W2344478882 hasConcept C181500209 @default.
• W2344478882 hasConcept C184779094 @default.
• W2344478882 hasConcept C19067145 @default.
• W2344478882 hasConcept C192562407 @default.
• W2344478882 hasConcept C194760766 @default.
• W2344478882 hasConcept C2777431650 @default.
• W2344478882 hasConcept C2779227376 @default.
• W2344478882 hasConcept C41008148 @default.
• W2344478882 hasConcept C43214815 @default.
• W2344478882 hasConcept C44838205 @default.
• W2344478882 hasConcept C49040817 @default.
• W2344478882 hasConcept C544956773 @default.
• W2344478882 hasConcept C62520636 @default.
• W2344478882 hasConcept C76155785 @default.
• W2344478882 hasConcept C82706917 @default.
• W2344478882 hasConceptScore W2344478882C119599485 @default.
• W2344478882 hasConceptScore W2344478882C121332964 @default.
• W2344478882 hasConceptScore W2344478882C127413603 @default.
• W2344478882 hasConceptScore W2344478882C133386390 @default.
• W2344478882 hasConceptScore W2344478882C163258240 @default.
• W2344478882 hasConceptScore W2344478882C165801399 @default.
• W2344478882 hasConceptScore W2344478882C166972891 @default.
• W2344478882 hasConceptScore W2344478882C171250308 @default.
• W2344478882 hasConceptScore W2344478882C172385210 @default.
• W2344478882 hasConceptScore W2344478882C181500209 @default.
• W2344478882 hasConceptScore W2344478882C184779094 @default.
• W2344478882 hasConceptScore W2344478882C19067145 @default.
• W2344478882 hasConceptScore W2344478882C192562407 @default.
• W2344478882 hasConceptScore W2344478882C194760766 @default.
• W2344478882 hasConceptScore W2344478882C2777431650 @default.
• W2344478882 hasConceptScore W2344478882C2779227376 @default.
• W2344478882 hasConceptScore W2344478882C41008148 @default.
• W2344478882 hasConceptScore W2344478882C43214815 @default.
• W2344478882 hasConceptScore W2344478882C44838205 @default.
• W2344478882 hasConceptScore W2344478882C49040817 @default.
• W2344478882 hasConceptScore W2344478882C544956773 @default.
• W2344478882 hasConceptScore W2344478882C62520636 @default.
• W2344478882 hasConceptScore W2344478882C76155785 @default.
• W2344478882 hasConceptScore W2344478882C82706917 @default.
• W2344478882 hasIssue "133" @default.
• W2344478882 hasLocation W23444788821 @default.
• W2344478882 hasOpenAccess W2344478882 @default.
• W2344478882 hasPrimaryLocation W23444788821 @default.
• W2344478882 hasRelatedWork W1519573697 @default.
• W2344478882 hasRelatedWork W1558698545 @default.
• W2344478882 hasRelatedWork W1596457640 @default.
• W2344478882 hasRelatedWork W1873251744 @default.
• W2344478882 hasRelatedWork W2049398211 @default.
• W2344478882 hasRelatedWork W2049992797 @default.
• W2344478882 hasRelatedWork W2060038069 @default.
• W2344478882 hasRelatedWork W2090795657 @default.
• W2344478882 hasRelatedWork W2096203810 @default.
• W2344478882 hasRelatedWork W2099970145 @default.
• W2344478882 hasRelatedWork W2112576149 @default.
• W2344478882 hasRelatedWork W2120652287 @default.
• W2344478882 hasRelatedWork W2128383799 @default.
• W2344478882 hasRelatedWork W2153034312 @default.
• W2344478882 hasRelatedWork W2241083107 @default.
• W2344478882 hasRelatedWork W2338178895 @default.
• W2344478882 hasRelatedWork W2533032190 @default.
• W2344478882 hasRelatedWork W2541631348 @default.
• W2344478882 hasRelatedWork W2544964840 @default.
• W2344478882 hasRelatedWork W2940268719 @default.
• W2344478882 hasVolume "102" @default.

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