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- W234821237 endingPage "234" @default.
- W234821237 startingPage "229" @default.
- W234821237 created "2016-06-24" @default.
- W234821237 creator A5012874068 @default.
- W234821237 creator A5037571064 @default.
- W234821237 creator A5039097610 @default.
- W234821237 creator A5039190013 @default.
- W234821237 creator A5079794782 @default.
- W234821237 date "1995-09-30" @default.
- W234821237 modified "2023-09-26" @default.
- W234821237 title "Optical Performance of KrF Excimer Laser Lithography with Phase Shift Mask for Fabrication of 0.15 μm and Below" @default.
- W234821237 hasPublicationYear "1995" @default.
- W234821237 type Work @default.
- W234821237 sameAs 234821237 @default.
- W234821237 citedByCount "0" @default.
- W234821237 crossrefType "journal-article" @default.
- W234821237 hasAuthorship W234821237A5012874068 @default.
- W234821237 hasAuthorship W234821237A5037571064 @default.
- W234821237 hasAuthorship W234821237A5039097610 @default.
- W234821237 hasAuthorship W234821237A5039190013 @default.
- W234821237 hasAuthorship W234821237A5079794782 @default.
- W234821237 hasConcept C105487726 @default.
- W234821237 hasConcept C120665830 @default.
- W234821237 hasConcept C121332964 @default.
- W234821237 hasConcept C136525101 @default.
- W234821237 hasConcept C142724271 @default.
- W234821237 hasConcept C192562407 @default.
- W234821237 hasConcept C204223013 @default.
- W234821237 hasConcept C204787440 @default.
- W234821237 hasConcept C2780477314 @default.
- W234821237 hasConcept C49040817 @default.
- W234821237 hasConcept C520434653 @default.
- W234821237 hasConcept C71924100 @default.
- W234821237 hasConcept C74561354 @default.
- W234821237 hasConceptScore W234821237C105487726 @default.
- W234821237 hasConceptScore W234821237C120665830 @default.
- W234821237 hasConceptScore W234821237C121332964 @default.
- W234821237 hasConceptScore W234821237C136525101 @default.
- W234821237 hasConceptScore W234821237C142724271 @default.
- W234821237 hasConceptScore W234821237C192562407 @default.
- W234821237 hasConceptScore W234821237C204223013 @default.
- W234821237 hasConceptScore W234821237C204787440 @default.
- W234821237 hasConceptScore W234821237C2780477314 @default.
- W234821237 hasConceptScore W234821237C49040817 @default.
- W234821237 hasConceptScore W234821237C520434653 @default.
- W234821237 hasConceptScore W234821237C71924100 @default.
- W234821237 hasConceptScore W234821237C74561354 @default.
- W234821237 hasIssue "3" @default.
- W234821237 hasLocation W2348212371 @default.
- W234821237 hasOpenAccess W234821237 @default.
- W234821237 hasPrimaryLocation W2348212371 @default.
- W234821237 hasRelatedWork W1971705391 @default.
- W234821237 hasRelatedWork W1972237080 @default.
- W234821237 hasRelatedWork W1982433231 @default.
- W234821237 hasRelatedWork W2001517910 @default.
- W234821237 hasRelatedWork W2008510059 @default.
- W234821237 hasRelatedWork W2008982228 @default.
- W234821237 hasRelatedWork W2014795787 @default.
- W234821237 hasRelatedWork W2047225152 @default.
- W234821237 hasRelatedWork W2058034748 @default.
- W234821237 hasRelatedWork W2059181868 @default.
- W234821237 hasRelatedWork W2062270107 @default.
- W234821237 hasRelatedWork W2066417548 @default.
- W234821237 hasRelatedWork W2069983720 @default.
- W234821237 hasRelatedWork W2087950936 @default.
- W234821237 hasRelatedWork W2138167127 @default.
- W234821237 hasRelatedWork W2533560431 @default.
- W234821237 hasRelatedWork W2091387673 @default.
- W234821237 hasRelatedWork W2750796241 @default.
- W234821237 hasRelatedWork W2752328548 @default.
- W234821237 hasRelatedWork W3211809677 @default.
- W234821237 hasVolume "29" @default.
- W234821237 isParatext "false" @default.
- W234821237 isRetracted "false" @default.
- W234821237 magId "234821237" @default.
- W234821237 workType "article" @default.