Matches in SemOpenAlex for { <https://semopenalex.org/work/W239220147> ?p ?o ?g. }
Showing items 1 to 29 of
29
with 100 items per page.
- W239220147 startingPage "515" @default.
- W239220147 created "2016-06-24" @default.
- W239220147 creator A5023169869 @default.
- W239220147 creator A5049656348 @default.
- W239220147 creator A5087017961 @default.
- W239220147 creator A5087236150 @default.
- W239220147 date "2002-03-01" @default.
- W239220147 modified "2023-09-24" @default.
- W239220147 title "新しいベルジャー型CMP装置(第1報):ベルジャー型CMP法の提案と基本的CMP特性" @default.
- W239220147 hasPublicationYear "2002" @default.
- W239220147 type Work @default.
- W239220147 sameAs 239220147 @default.
- W239220147 citedByCount "0" @default.
- W239220147 crossrefType "journal-article" @default.
- W239220147 hasAuthorship W239220147A5023169869 @default.
- W239220147 hasAuthorship W239220147A5049656348 @default.
- W239220147 hasAuthorship W239220147A5087017961 @default.
- W239220147 hasAuthorship W239220147A5087236150 @default.
- W239220147 hasConcept C41008148 @default.
- W239220147 hasConceptScore W239220147C41008148 @default.
- W239220147 hasIssue "1" @default.
- W239220147 hasLocation W2392201471 @default.
- W239220147 hasOpenAccess W239220147 @default.
- W239220147 hasPrimaryLocation W2392201471 @default.
- W239220147 hasVolume "2002" @default.
- W239220147 isParatext "false" @default.
- W239220147 isRetracted "false" @default.
- W239220147 magId "239220147" @default.
- W239220147 workType "article" @default.