Matches in SemOpenAlex for { <https://semopenalex.org/work/W2470929501> ?p ?o ?g. }
Showing items 1 to 59 of
59
with 100 items per page.
- W2470929501 created "2016-07-22" @default.
- W2470929501 creator A5006334080 @default.
- W2470929501 creator A5018676580 @default.
- W2470929501 creator A5033377266 @default.
- W2470929501 creator A5036063812 @default.
- W2470929501 creator A5058859799 @default.
- W2470929501 date "2002-01-01" @default.
- W2470929501 modified "2023-09-23" @default.
- W2470929501 title "One Cleaning Solution for Complete CMOS Processes" @default.
- W2470929501 doi "https://doi.org/10.7567/ssdm.2002.p3-14" @default.
- W2470929501 hasPublicationYear "2002" @default.
- W2470929501 type Work @default.
- W2470929501 sameAs 2470929501 @default.
- W2470929501 citedByCount "0" @default.
- W2470929501 crossrefType "proceedings-article" @default.
- W2470929501 hasAuthorship W2470929501A5006334080 @default.
- W2470929501 hasAuthorship W2470929501A5018676580 @default.
- W2470929501 hasAuthorship W2470929501A5033377266 @default.
- W2470929501 hasAuthorship W2470929501A5036063812 @default.
- W2470929501 hasAuthorship W2470929501A5058859799 @default.
- W2470929501 hasConcept C127413603 @default.
- W2470929501 hasConcept C171250308 @default.
- W2470929501 hasConcept C192562407 @default.
- W2470929501 hasConcept C21880701 @default.
- W2470929501 hasConcept C46362747 @default.
- W2470929501 hasConcept C49040817 @default.
- W2470929501 hasConceptScore W2470929501C127413603 @default.
- W2470929501 hasConceptScore W2470929501C171250308 @default.
- W2470929501 hasConceptScore W2470929501C192562407 @default.
- W2470929501 hasConceptScore W2470929501C21880701 @default.
- W2470929501 hasConceptScore W2470929501C46362747 @default.
- W2470929501 hasConceptScore W2470929501C49040817 @default.
- W2470929501 hasLocation W24709295011 @default.
- W2470929501 hasOpenAccess W2470929501 @default.
- W2470929501 hasPrimaryLocation W24709295011 @default.
- W2470929501 hasRelatedWork W1499119715 @default.
- W2470929501 hasRelatedWork W2460765773 @default.
- W2470929501 hasRelatedWork W2462240173 @default.
- W2470929501 hasRelatedWork W2462471312 @default.
- W2470929501 hasRelatedWork W2462703647 @default.
- W2470929501 hasRelatedWork W2463637359 @default.
- W2470929501 hasRelatedWork W2464180863 @default.
- W2470929501 hasRelatedWork W2464589712 @default.
- W2470929501 hasRelatedWork W2466685366 @default.
- W2470929501 hasRelatedWork W2469416154 @default.
- W2470929501 hasRelatedWork W2471685219 @default.
- W2470929501 hasRelatedWork W2472241499 @default.
- W2470929501 hasRelatedWork W2473200539 @default.
- W2470929501 hasRelatedWork W2473837626 @default.
- W2470929501 hasRelatedWork W2473849504 @default.
- W2470929501 hasRelatedWork W3135507717 @default.
- W2470929501 hasRelatedWork W354511021 @default.
- W2470929501 hasRelatedWork W373476369 @default.
- W2470929501 hasRelatedWork W561740092 @default.
- W2470929501 hasRelatedWork W581450019 @default.
- W2470929501 isParatext "false" @default.
- W2470929501 isRetracted "false" @default.
- W2470929501 magId "2470929501" @default.
- W2470929501 workType "article" @default.