Matches in SemOpenAlex for { <https://semopenalex.org/work/W2496378040> ?p ?o ?g. }
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with 100 items per page.
- W2496378040 endingPage "25" @default.
- W2496378040 startingPage "21" @default.
- W2496378040 created "2016-08-23" @default.
- W2496378040 creator A5044713713 @default.
- W2496378040 creator A5066569370 @default.
- W2496378040 creator A5083642513 @default.
- W2496378040 date "2008-04-01" @default.
- W2496378040 modified "2023-09-28" @default.
- W2496378040 title "Key parameters demonstrated for high-volume EUV lithography sources" @default.
- W2496378040 hasPublicationYear "2008" @default.
- W2496378040 type Work @default.
- W2496378040 sameAs 2496378040 @default.
- W2496378040 citedByCount "0" @default.
- W2496378040 crossrefType "journal-article" @default.
- W2496378040 hasAuthorship W2496378040A5044713713 @default.
- W2496378040 hasAuthorship W2496378040A5066569370 @default.
- W2496378040 hasAuthorship W2496378040A5083642513 @default.
- W2496378040 hasConcept C121332964 @default.
- W2496378040 hasConcept C162996421 @default.
- W2496378040 hasConcept C192562407 @default.
- W2496378040 hasConcept C204223013 @default.
- W2496378040 hasConcept C20556612 @default.
- W2496378040 hasConcept C26517878 @default.
- W2496378040 hasConcept C38652104 @default.
- W2496378040 hasConcept C41008148 @default.
- W2496378040 hasConcept C49040817 @default.
- W2496378040 hasConcept C62520636 @default.
- W2496378040 hasConceptScore W2496378040C121332964 @default.
- W2496378040 hasConceptScore W2496378040C162996421 @default.
- W2496378040 hasConceptScore W2496378040C192562407 @default.
- W2496378040 hasConceptScore W2496378040C204223013 @default.
- W2496378040 hasConceptScore W2496378040C20556612 @default.
- W2496378040 hasConceptScore W2496378040C26517878 @default.
- W2496378040 hasConceptScore W2496378040C38652104 @default.
- W2496378040 hasConceptScore W2496378040C41008148 @default.
- W2496378040 hasConceptScore W2496378040C49040817 @default.
- W2496378040 hasConceptScore W2496378040C62520636 @default.
- W2496378040 hasIssue "2" @default.
- W2496378040 hasLocation W24963780401 @default.
- W2496378040 hasOpenAccess W2496378040 @default.
- W2496378040 hasPrimaryLocation W24963780401 @default.
- W2496378040 hasRelatedWork W2005045665 @default.
- W2496378040 hasRelatedWork W2331086033 @default.
- W2496378040 hasRelatedWork W2526802901 @default.
- W2496378040 hasRelatedWork W2544906674 @default.
- W2496378040 hasRelatedWork W2608768700 @default.
- W2496378040 hasRelatedWork W2914595912 @default.
- W2496378040 hasRelatedWork W2969175618 @default.
- W2496378040 hasRelatedWork W2993321506 @default.
- W2496378040 hasRelatedWork W3099434723 @default.
- W2496378040 hasRelatedWork W3103978859 @default.
- W2496378040 hasRelatedWork W3130909418 @default.
- W2496378040 hasRelatedWork W3162594780 @default.
- W2496378040 hasRelatedWork W2774972689 @default.
- W2496378040 hasRelatedWork W2852512233 @default.
- W2496378040 hasRelatedWork W2852630104 @default.
- W2496378040 hasRelatedWork W2852688199 @default.
- W2496378040 hasRelatedWork W2853264836 @default.
- W2496378040 hasRelatedWork W2895702992 @default.
- W2496378040 hasRelatedWork W2928963095 @default.
- W2496378040 hasRelatedWork W2934227963 @default.
- W2496378040 hasVolume "31" @default.
- W2496378040 isParatext "false" @default.
- W2496378040 isRetracted "false" @default.
- W2496378040 magId "2496378040" @default.
- W2496378040 workType "article" @default.