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- W2509768026 created "2016-09-16" @default.
- W2509768026 creator A5031201064 @default.
- W2509768026 creator A5039137527 @default.
- W2509768026 creator A5046026372 @default.
- W2509768026 creator A5057493913 @default.
- W2509768026 creator A5059925515 @default.
- W2509768026 creator A5065028759 @default.
- W2509768026 creator A5067493305 @default.
- W2509768026 creator A5076541140 @default.
- W2509768026 creator A5078007657 @default.
- W2509768026 date "2016-09-23" @default.
- W2509768026 modified "2023-09-25" @default.
- W2509768026 title "(Invited) SiOxNy Back-End Integration Technologies for Heterogeneously Integrated Si Platform" @default.
- W2509768026 doi "https://doi.org/10.1149/07508.0211ecst" @default.
- W2509768026 hasPublicationYear "2016" @default.
- W2509768026 type Work @default.
- W2509768026 sameAs 2509768026 @default.
- W2509768026 citedByCount "0" @default.
- W2509768026 crossrefType "journal-article" @default.
- W2509768026 hasAuthorship W2509768026A5031201064 @default.
- W2509768026 hasAuthorship W2509768026A5039137527 @default.
- W2509768026 hasAuthorship W2509768026A5046026372 @default.
- W2509768026 hasAuthorship W2509768026A5057493913 @default.
- W2509768026 hasAuthorship W2509768026A5059925515 @default.
- W2509768026 hasAuthorship W2509768026A5065028759 @default.
- W2509768026 hasAuthorship W2509768026A5067493305 @default.
- W2509768026 hasAuthorship W2509768026A5076541140 @default.
- W2509768026 hasAuthorship W2509768026A5078007657 @default.
- W2509768026 hasConcept C31258907 @default.
- W2509768026 hasConcept C41008148 @default.
- W2509768026 hasConcept C74296488 @default.
- W2509768026 hasConceptScore W2509768026C31258907 @default.
- W2509768026 hasConceptScore W2509768026C41008148 @default.
- W2509768026 hasConceptScore W2509768026C74296488 @default.
- W2509768026 hasLocation W25097680261 @default.
- W2509768026 hasOpenAccess W2509768026 @default.
- W2509768026 hasPrimaryLocation W25097680261 @default.
- W2509768026 hasRelatedWork W1964661536 @default.
- W2509768026 hasRelatedWork W1971715429 @default.
- W2509768026 hasRelatedWork W1992280080 @default.
- W2509768026 hasRelatedWork W2012804772 @default.
- W2509768026 hasRelatedWork W2060254692 @default.
- W2509768026 hasRelatedWork W2256792969 @default.
- W2509768026 hasRelatedWork W2274623305 @default.
- W2509768026 hasRelatedWork W2278181831 @default.
- W2509768026 hasRelatedWork W2339961772 @default.
- W2509768026 hasRelatedWork W2508195829 @default.
- W2509768026 hasRelatedWork W2511020726 @default.
- W2509768026 hasRelatedWork W2518508358 @default.
- W2509768026 hasRelatedWork W2676973484 @default.
- W2509768026 hasRelatedWork W2680775348 @default.
- W2509768026 hasRelatedWork W275663643 @default.
- W2509768026 hasRelatedWork W2787829510 @default.
- W2509768026 hasRelatedWork W2890545230 @default.
- W2509768026 hasRelatedWork W2892079657 @default.
- W2509768026 hasRelatedWork W2915607884 @default.
- W2509768026 hasRelatedWork W2929319678 @default.
- W2509768026 isParatext "false" @default.
- W2509768026 isRetracted "false" @default.
- W2509768026 magId "2509768026" @default.
- W2509768026 workType "article" @default.