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- W2511841711 endingPage "26" @default.
- W2511841711 startingPage "23" @default.
- W2511841711 created "2016-09-16" @default.
- W2511841711 creator A5051034795 @default.
- W2511841711 date "2001-01-01" @default.
- W2511841711 modified "2023-10-06" @default.
- W2511841711 title "Lithography Technology in 21st Century" @default.
- W2511841711 doi "https://doi.org/10.1541/ieejeiss1987.121.1_23" @default.
- W2511841711 hasPublicationYear "2001" @default.
- W2511841711 type Work @default.
- W2511841711 sameAs 2511841711 @default.
- W2511841711 citedByCount "0" @default.
- W2511841711 crossrefType "journal-article" @default.
- W2511841711 hasAuthorship W2511841711A5051034795 @default.
- W2511841711 hasBestOaLocation W25118417111 @default.
- W2511841711 hasConcept C171250308 @default.
- W2511841711 hasConcept C192562407 @default.
- W2511841711 hasConcept C204223013 @default.
- W2511841711 hasConcept C49040817 @default.
- W2511841711 hasConceptScore W2511841711C171250308 @default.
- W2511841711 hasConceptScore W2511841711C192562407 @default.
- W2511841711 hasConceptScore W2511841711C204223013 @default.
- W2511841711 hasConceptScore W2511841711C49040817 @default.
- W2511841711 hasIssue "1" @default.
- W2511841711 hasLocation W25118417111 @default.
- W2511841711 hasOpenAccess W2511841711 @default.
- W2511841711 hasPrimaryLocation W25118417111 @default.
- W2511841711 hasRelatedWork W178758932 @default.
- W2511841711 hasRelatedWork W1969798555 @default.
- W2511841711 hasRelatedWork W1994078670 @default.
- W2511841711 hasRelatedWork W2039969115 @default.
- W2511841711 hasRelatedWork W2094656325 @default.
- W2511841711 hasRelatedWork W2156096016 @default.
- W2511841711 hasRelatedWork W2395305396 @default.
- W2511841711 hasRelatedWork W3000789669 @default.
- W2511841711 hasRelatedWork W3094579937 @default.
- W2511841711 hasRelatedWork W3158953259 @default.
- W2511841711 hasVolume "121" @default.
- W2511841711 isParatext "false" @default.
- W2511841711 isRetracted "false" @default.
- W2511841711 magId "2511841711" @default.
- W2511841711 workType "article" @default.